Patents by Inventor William S. Seals

William S. Seals has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma etching chamber parts made with EDM
    Publication number: 20070284339
    Abstract: A method is disclosed for manufacturing chamber parts for plasma etching chambers involving electronic discharge machining (EDM) methods that allows silicon and other ceramic materials to be formed and drilled. Key factors disclosed relate to the clamping of such materials for the EDM machining to avoid the electrical current inhibiting influence of oxide coatings that these materials can form.
    Type: Application
    Filed: June 9, 2006
    Publication date: December 13, 2007
    Inventors: David O. Moore, William S. Seals, Shannon Spencer, George Diercks, Gary Poovey