Patents by Inventor William Salamon, Jr.

William Salamon, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for recovery of semiconductor wafers from a chemical tank
    Patent number: 6514355
    Abstract: A method for stopping chemical processing of a semiconductor wafer in an emergency included the steps of: 1) placing a chemical having a water concentration of about 92% or less in a tank; 2) processing a semiconductor wafer with the chemical in the process tank; 3) detecting a malfunction in the processing; 4) quick draining the chemical from the process tank; and 5) rinsing the wafer in the process tank with a rinsing material to stop chemical action. Optionally, the method may include recycling the drained chemical from a storage tank to the process tank for use in a subsequent process step.
    Type: Grant
    Filed: February 8, 1999
    Date of Patent: February 4, 2003
    Assignee: International Business Machines Corporation
    Inventors: Ernest Betancourt, Jeffrey A. Brigante, Glenn W. Gale, William Salamon, Jr.