Abstract: Forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components subsequently installed in a reaction chamber provides a number of benefits over more conventional coating methods such as in situ deposition of an undercoat. In certain cases the protective coating may have a particular composition such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and/or yttrium fluoride. The protective coating may help reduce contamination on wafers processed using the coated chamber component. Further, the protective coating may act to stabilize the processing conditions within the reaction chamber, thereby achieving very stable/uniform processing results over the course of processing many batches of wafers, and minimizing radical loss. Also described are a number of techniques that may be used to restore the protective coating after the coated chamber component is used to process semiconductor wafers.

Abstract: Forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components subsequently installed in a reaction chamber provides a number of benefits over more conventional coating methods such as in situ deposition of an undercoat. In certain cases the protective coating may have a particular composition such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and/or yttrium fluoride. The protective coating may help reduce contamination on wafers processed using the coated chamber component. Further, the protective coating may act to stabilize the processing conditions within the reaction chamber, thereby achieving very stable/uniform processing results over the course of processing many batches of wafers, and minimizing radical loss. Also described are a number of techniques that may be used to restore the protective coating after the coated chamber component is used to process semiconductor wafers.

Abstract: Forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components subsequently installed in a reaction chamber provides a number of benefits over more conventional coating methods such as in situ deposition of an undercoat. In certain cases the protective coating may have a particular composition such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and/or yttrium fluoride. The protective coating may help reduce contamination on wafers processed using the coated chamber component. Further, the protective coating may act to stabilize the processing conditions within the reaction chamber, thereby achieving very stable/uniform processing results over the course of processing many batches of wafers, and minimizing radical loss. Also described are a number of techniques that may be used to restore the protective coating after the coated chamber component is used to process semiconductor wafers.

Abstract: Forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components subsequently installed in a reaction chamber provides a number of benefits over more conventional coating methods such as in situ deposition of an undercoat. In certain cases the protective coating may have a particular composition such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and/or yttrium fluoride. The protective coating may help reduce contamination on wafers processed using the coated chamber component. Further, the protective coating may act to stabilize the processing conditions within the reaction chamber, thereby achieving very stable/uniform processing results over the course of processing many batches of wafers, and minimizing radical loss. Also described are a number of techniques that may be used to restore the protective coating after the coated chamber component is used to process semiconductor wafers.

Abstract: Forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components subsequently installed in a reaction chamber provides a number of benefits over more conventional coating methods such as in situ deposition of an undercoat. In certain cases the protective coating may have a particular composition such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and/or yttrium fluoride. The protective coating may help reduce contamination on wafers processed using the coated chamber component. Further, the protective coating may act to stabilize the processing conditions within the reaction chamber, thereby achieving very stable/uniform processing results over the course of processing many batches of wafers, and minimizing radical loss. Also described are a number of techniques that may be used to restore the protective coating after the coated chamber component is used to process semiconductor wafers.

Abstract: Forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components subsequently installed in a reaction chamber provides a number of benefits over more conventional coating methods such as in situ deposition of an undercoat. In certain cases the protective coating may have a particular composition such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and/or yttrium fluoride. The protective coating may help reduce contamination on wafers processed using the coated chamber component. Further, the protective coating may act to stabilize the processing conditions within the reaction chamber, thereby achieving very stable/uniform processing results over the course of processing many batches of wafers, and minimizing radical loss. Also described are a number of techniques that may be used to restore the protective coating after the coated chamber component is used to process semiconductor wafers.

Abstract: Various embodiments provide keyboards that provide haptic feedback to a user of the keyboard. In at least some embodiments, movement of an actuator and/or a user-engageable portion in a direction generally orthogonal to a direction of the keypress when the switch is closed provides a user with haptic feedback, which simulates a snapover movement.

Abstract: Various embodiments provide a keyboard that adaptively provides haptic feedback to a user. In at least some embodiments, an actuation of a key or keyboard element of the keyboard is detected. This can be accomplished by detecting the closure of an associated switch caused by a user depressing the key or keyboard element. In response to detecting the actuation, an electrically-deformable material is utilized as an actuating mechanism to impart single or multi-vectored movement to the key or keyboard element according to drive parameters. This movement produces a perceived acceleration of the key or keyboard element, thus providing haptic feedback which simulates a “snapover” effect.

Abstract: Various embodiments provide keyboards that utilize electrically-deformable material as an actuating mechanism to provide haptic feedback to a user of the keyboard. In at least some embodiments, the electrically-deformable material is utilized to impart, to a depressed key or keyboard element, a multi-vectored movement that produces a perceived acceleration of the key or keyboard element thus providing a user with haptic feedback which simulates a snapover movement. In at least some embodiments, a light source can be mounted or otherwise positioned relatively close to and beneath the top surface of one or more keys or keyboard elements to backlight a portion or portions of a keyboard.

Abstract: In one or more embodiments, vector-specific movement can be imparted to a user interface device (UID) to provide vector-specific haptic feedback. In at least some embodiments, this vectored movement can be based on input received by the UID. The input can include information associated with the user's interaction with an associated device integrated with or communicatively linked with the UID, and or with an application implemented on the associated device. In at least some embodiments, the UID can be configured with a controller, a microprocessor(s), and a vector-specific actuator that includes an electrically-deformable material.

Abstract: Various embodiments provide keyboards that provide haptic feedback to a user of the keyboard. In at least some embodiments, movement of an actuator and/or a user-engageable portion in a direction generally orthogonal to a direction of the keypress when the switch is closed provides a user with haptic feedback, which simulates a snapover movement.

Abstract: Various embodiments provide keyboards that utilize electrically-deformable material as an actuating mechanism to provide haptic feedback to a user of the keyboard. In at least some embodiments, the electrically-deformable material is utilized to impart, to a depressed key or keyboard element, a multi-vectored movement that produces a perceived acceleration of the key or keyboard element thus providing a user with haptic feedback which simulates a snapover movement. In at least some embodiments, a light source can be mounted or otherwise positioned relatively close to and beneath the top surface of one or more keys or keyboard elements to backlight a portion or portions of a keyboard.

Abstract: Various embodiments provide a keyboard that adaptively provides haptic feedback to a user. In at least some embodiments, an actuation of a key or keyboard element of the keyboard is detected. This can be accomplished by detecting the closure of an associated switch caused by a user depressing the key or keyboard element. In response to detecting the actuation, an electrically-deformable material is utilized as an actuating mechanism to impart single or multi-vectored movement to the key or keyboard element according to drive parameters. This movement produces a perceived acceleration of the key or keyboard element, thus providing haptic feedback which simulates a “snapover” effect.

Abstract: An electronic device includes a touch surface that can be physically engaged by a user. The touch surface is operably connected to an actuator arm which, in turn, is connected to an actuator array. Drive electronics sense a user's movement relative to the touch surface and, responsively, drive the actuator array effective to move the actuator arm and, in turn, provide haptic feedback to the user through the touch surface.

Abstract: Various embodiments provide a keyboard that adaptively provides haptic feedback to a user. In at least some embodiments, an actuation of a key or keyboard element of the keyboard is detected. This can be accomplished by detecting the closure of an associated switch caused by a user depressing the key or keyboard element. In response to detecting the actuation, an electrically-deformable material is utilized as an actuating mechanism to impart single or multi-vectored movement to the key or keyboard element according to drive parameters. This movement produces a perceived acceleration of the key or keyboard element, thus providing haptic feedback which simulates a “snapover” effect.

Abstract: In one or more embodiments, vector-specific movement can be imparted to a user interface device (UID) to provide vector-specific haptic feedback. In at least some embodiments, this vectored movement can be based on input received by the UID. The input can include information associated with the user's interaction with an associated device integrated with or communicatively linked with the UID, and or with an application implemented on the associated device. In at least some embodiments, the UID can be configured with a controller, a microprocessor(s), and a vector-specific actuator that includes an electrically-deformable material.

Abstract: Various embodiments provide keyboards that utilize electrically-deformable material as an actuating mechanism to provide haptic feedback to a user of the keyboard. In at least some embodiments, the electrically-deformable material is utilized to impart, to a depressed key or keyboard element, a multi-vectored movement that produces a perceived acceleration of the key or keyboard element thus providing a user with haptic feedback which simulates a snapover movement. In at least some embodiments, a key or keyboard element can be associated with comparatively little or no actuation force and/or travel distance. As a result, the amount of work necessary to actuate the key or keyboard element can be significantly decreased or eliminated.

Abstract: Various embodiments provide keyboards that utilize electrically-deformable material as an actuating mechanism to provide haptic feedback to a user of the keyboard. In at least some embodiments, the electrically-deformable material is utilized to impart, to a depressed key or keyboard element, a multi-vectored movement that produces a perceived acceleration of the key or keyboard element thus providing a user with haptic feedback which simulates a snapover movement.

Abstract: In one or more embodiments, vector-specific movement can be imparted to a user interface device (UID) to provide vector-specific haptic feedback. In at least some embodiments, this vectored movement can be based on input received by the UID. The input can include information associated with the user's interaction with an associated device integrated with or communicatively linked with the UID, and or with an application implemented on the associated device. In at least some embodiments, the UID can be configured with a controller, a microprocessor(s), and a vector-specific actuator that includes an electrically-deformable material.

Abstract: Various embodiments provide keyboards that utilize electrically-deformable material as an actuating mechanism to provide haptic feedback to a user of the keyboard. In at least some embodiments, the electrically-deformable material is utilized to impart, to a depressed key or keyboard element, a multi-vectored movement that produces a perceived acceleration of the key or keyboard element thus providing a user with haptic feedback which simulates a snapover movement. In at least some embodiments, a light source can be mounted or otherwise positioned relatively close to and beneath the top surface of one or more keys or keyboard elements to backlight a portion or portions of a keyboard.