Patents by Inventor William Schumaker

William Schumaker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for pumping laser sustained plasma with interlaced pulsed illumination sources
    Patent number: 11121521
    Abstract: A system for pumping laser sustained plasma is disclosed. The system includes a plurality of pump modules configured to generate respective pulses of pump illumination for the laser sustained plasma, wherein at least one pump module is configured to generate a train of pump pulses that is interlaced in time with another train of pump pulses generated by at least one other pump module of the plurality of pump modules. The system further includes a plurality of non-collinear illumination paths configured to direct the respective pulses of pump illumination from the plurality of pump modules into a collection volume of the laser sustained plasma.
    Type: Grant
    Filed: February 14, 2020
    Date of Patent: September 14, 2021
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Matthew Derstine, William Schumaker, Michael Friedmann
  • System and Method for Pumping Laser Sustained Plasma with Interlaced Pulsed Illumination Sources
    Publication number: 20200274314
    Abstract: A system for pumping laser sustained plasma is disclosed. The system includes a plurality of pump modules configured to generate respective pulses of pump illumination for the laser sustained plasma, wherein at least one pump module is configured to generate a train of pump pulses that is interlaced in time with another train of pump pulses generated by at least one other pump module of the plurality of pump modules. The system further includes a plurality of non-collinear illumination paths configured to direct the respective pulses of pump illumination from the plurality of pump modules into a collection volume of the laser sustained plasma.
    Type: Application
    Filed: February 14, 2020
    Publication date: August 27, 2020
    Inventors: Ilya Bezel, Matthew Derstine, William Schumaker, Michael Friedmann