Patents by Inventor William Stenglein

William Stenglein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radio frequency power control system
    Patent number: 8040068
    Abstract: A radio frequency (RF) system includes a control module that allocates M predetermined frequency intervals. The system also includes N RF sources that each applies first RF power to electrodes within a plasma chamber at frequencies within an assigned respective one of the M predetermined frequency intervals. The N RF sources also each respond to second RF power including feedback from the plasma chamber. The N RF sources each include a processing module that adjusts the first RF power based on the second RF power and the respective one of the M predetermined frequency intervals. M and N are integers greater than 1.
    Type: Grant
    Filed: February 5, 2009
    Date of Patent: October 18, 2011
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Paul Eyerman, Carl Ioriatti, William Stenglein, Larry J. Fisk, II, Aaron Radomski, Richard Pham
  • Radio Frequency Power Control System
    Publication number: 20100194195
    Abstract: A radio frequency (RF) system includes a control module that allocates M predetermined frequency intervals. The system also includes N RF sources that each applies first RF power to electrodes within a plasma chamber at frequencies within an assigned respective one of the M predetermined frequency intervals. The N RF sources also each respond to second RF power including feedback from the plasma chamber. The N RF sources each include a processing module that adjusts the first RF power based on the second RF power and the respective one of the M predetermined frequency intervals. M and N are integers greater than 1.
    Type: Application
    Filed: February 5, 2009
    Publication date: August 5, 2010
    Applicant: MKS Instruments, Inc.
    Inventors: David J. Coumou, Paul Eyerman, Carl Ioriatti, William Stenglein, Larry J. Fisk, II, Aaron Radomski, Richard Pham