Abstract: An enhanced spatial light modulator (ESLM) array, a microelectronics patterning system and a projection display system using such an ESLM for heat-minimization and resolution enhancement during imaging, and the method for fabricating such an ESLM array. The ESLM array includes, in each individual pixel element, a small pixel mirror (reflective region) and a much larger pixel surround. Each pixel surround includes diffraction-grating regions and resolution-enhancement regions. During imaging, a selected pixel mirror reflects a selected-pixel beamlet into the capture angle of a projection lens, while the diffraction grating of the pixel surround redirects heat-producing unused radiation away from the projection lens. The resolution-enhancement regions of selected pixels provide phase shifts that increase effective modulation-transfer function in imaging. All of the non-selected pixel surrounds redirect all radiation energy away from the projection lens.

Abstract: A light reflecting apparatus including a multi-aberration bendable light reflecting surface is disclosed herein. This apparatus includes a structural assembly comprised of a rectangular plate which is resiliently bendable, to a limited extent, and which has a front side defining the multi-aberration light reflecting surface and an opposite back side, and a plurality of straight leg members rigidly connected with the back side of the plate and extending rearwardly therefrom. The apparatus also includes a number of different adjustment mechanisms, each of which is connected with specific ones of the leg members. These mechanisms are adjustably movable in different ways for applying corresponding forces to the leg members in order to bend the rectangular plate and light reflecting surface into different predetermined curvatures and which specifically include quadratic and cubic curvatures corresponding to different optical aberrations.

Abstract: A technique for adjustably correcting for astigmatism in a light beam is disclosed herein. This technique utilizes first means which defines a flat, rectangular light reflecting surface having opposite reinforced side edges and which is resiliently bendable, to a limited extent, into different concave and/or convex cylindrical curvatures about a particular axis and second means acting on the first means for adjustably bending the light reflecting surface into a particular selected one of the different curvatures depending upon the astigmatism to be corrected for and for fixedly maintaining the curvature selected. In the embodiment disclosed, the light reflecting surface is adjustably bendable into the selected cylindrical curvature by application of a particular bending moment to the reinforced side edges of the light reflecting surface.