Abstract: A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.

Abstract: A valve chip may include a substrate having first and second faces and openings between the first and second faces, and a plurality of flexible valve flaps on one of the faces of the substrate with each flexible valve flap being associated with at least one of the openings. The valve chip may be packaged by forming a frame having an opening therein, and securing the valve chip in the opening of the frame. More particularly, the valve chip may be secured in the opening so that central portions of the first and second faces of the substrate are exposed through the opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate. Related valves, valve assemblies, and methods are also discussed.