Patents by Inventor William Tuggle

William Tuggle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9679742
    Abstract: The present invention provides a method for optimizing a shaped working beam having a sharp edge for making sufficiently precise cuts and a high beam current for faster processing. An ion beam is directed along an optical column through a reference aperture to form a reference beam that has a preferred shape and an associated reference current. The reference beam is optimized using selected parameters of the optical components within the optical column. The ion beam is then directed through a working aperture to form a working beam for use in a processing application. The working beam has a different shape from the reference beam and an associated working current that is higher than the reference current. The reference aperture and working aperture have at least one corresponding dimension. The working beam is then optimized using the selected optical component parameters used to align and focus the reference beam.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: June 13, 2017
    Assignee: FEI Company
    Inventors: Richard Swinford, Mostafa Maazouz, David William Tuggle, William M. Steinhardt
  • Publication number: 20170125207
    Abstract: The present invention provides a method for optimizing a shaped working beam having a sharp edge for making sufficiently precise cuts and a high beam current for faster processing. An ion beam is directed along an optical column through a reference aperture to form a reference beam that has a preferred shape and an associated reference current. The reference beam is optimized using selected parameters of the optical components within the optical column. The ion beam is then directed through a working aperture to form a working beam for use in a processing application. The working beam has a different shape from the reference beam and an associated working current that is higher than the reference current. The reference aperture and working aperture have at least one corresponding dimension. The working beam is then optimized using the selected optical component parameters used to align and focus the reference beam.
    Type: Application
    Filed: December 28, 2015
    Publication date: May 4, 2017
    Applicant: FEI Company
    Inventors: Richard Swinford, Mostafa Maazouz, David William Tuggle, William M. Steinhardt
  • Patent number: 9401262
    Abstract: The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: July 26, 2016
    Assignee: FEI COMPANY
    Inventors: Noel Smith, Clive D. Chandler, Mark W. Utlaut, Paul P. Tesch, David William Tuggle
  • Publication number: 20150318140
    Abstract: The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
    Type: Application
    Filed: May 12, 2015
    Publication date: November 5, 2015
    Applicant: FEI Company
    Inventors: Noel Smith, Clive D. Chandler, Mark W. Utlaut, Paul P. Tesch, David William Tuggle
  • Patent number: 9029812
    Abstract: The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
    Type: Grant
    Filed: April 8, 2014
    Date of Patent: May 12, 2015
    Assignee: Fei Company
    Inventors: Noel Smith, Clive D. Chandler, Mark W. Utlaut, Paul P. Tesch, David William Tuggle
  • Patent number: 8907296
    Abstract: An improved beam-defining aperture structure and method for fabrication is realized. An aperture opening is made in a thin conductive film positioned over a cavity in a support substrate, where the aperture size and shape is determined by the opening in the conductive film and not determined by the substrate.
    Type: Grant
    Filed: November 6, 2012
    Date of Patent: December 9, 2014
    Assignee: FEI Company
    Inventors: N. William Parker, Mark W. Utlaut, David William Tuggle, Jeremy Graham
  • Publication number: 20140312245
    Abstract: The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
    Type: Application
    Filed: April 8, 2014
    Publication date: October 23, 2014
    Applicant: FEI Company
    Inventors: Noel Smith, Clive D. Chandler, Mark W. Utlaut, Paul P. Tesch, David William Tuggle
  • Patent number: 8803102
    Abstract: A retarding field analyzer uses the existing components of a charged particle beam system eliminating the need for inserting a separate retarding field analyzer device. Using components of the existing column reduces the time required to analyze the beam. Using the imaging capabilities of the existing column facilitates alignment of the beam with the analyzer.
    Type: Grant
    Filed: March 19, 2013
    Date of Patent: August 12, 2014
    Assignee: FEI Company
    Inventors: David William Tuggle, James B. McGinn, Charles Otis
  • Publication number: 20060144494
    Abstract: A low pressure tire including a torus of flexible, substantially inelastic material. The material will not deform at a temperature of about 225° F. The torus includes an inner diameter surface for engaging a tire supporting rim and an outer diameter surface for contacting a support surface. The torus can flatten under a load to facilitate movement of the tire over soft or irregular support surfaces. A sealable opening permits the inflation and deflation of the torus, and includes a valve stem housing and a valve stem having a plurality of barbs which taper inwardly in the direction of the valve stem housing.
    Type: Application
    Filed: October 18, 2002
    Publication date: July 6, 2006
    Applicant: Wetsco, Inc.
    Inventor: William Tuggle
  • Publication number: 20060076096
    Abstract: A wheel and tire assembly for recreational vehicles, such as mountainboards, motorized carts and pedaled carts is provided. The tire comprises a tire made of substantially inelastic material that will not stretch under a load. Thus, the tire will flatten under a load to provide a high level of traction on soft and irregular surfaces, as well as on hard and flat surfaces. The tire includes protrusions on its inner diameter surface for securely engaging the wheel. The wheel includes a rim that supports the tire and includes protrusions for engaging the protrusions of the tire in an interdigitating manner. The interdigitating engagement of the protrusions on the tire with the protrusions on the wheel prevents slippage and rotation of the tire relative to the wheel. The wheel also includes support flanges that extend radially inward from the rim in order to protect the tire from damage as the tire deforms under a load.
    Type: Application
    Filed: July 22, 2005
    Publication date: April 13, 2006
    Inventor: William Tuggle