Abstract: A plasma reactor having a reactor chamber and an electrostatic chuck with a surface for holding a workpiece inside the chamber includes a backside gas pressure source coupled to the electrostatic chuck for applying a thermally conductive gas under a selected pressure into a workpiece-surface interface formed whenever a workpiece is held on the surface and an evaporator inside the electrostatic chuck and a refrigeration loop having an expansion valve for controlling flow of coolant through the evaporator. The reactor further includes a temperature sensor in the electrostatic chuck and a memory storing a schedule of changes in RF power or wafer temperature.

Abstract: A method of processing a workpiece in a plasma reactor having an electrostatic chuck for holding a workpiece in a chamber of the reactor includes providing a thermally conductive gas under pressure between a backside of the workpiece and a top surface of the electrostatic chuck, controlling the temperature of the electrostatic chuck, defining a desired workpiece temperature, measuring a current workpiece temperature or temperature related to the workpiece temperature and inputting the measured temperature to a thermal model representative of the electrostatic chuck. The method further includes determining from the thermal model a change in the pressure of the thermally conductive gas that would at least reduce the difference between the measured temperature and the desired temperature, and changing the pressure of the thermally conductive gas in accordance with the change determined from the thermal model.

Abstract: In a plasma reactor having an electrostatic chuck with an electrostatic chuck top surface for supporting a workpiece, thermal transfer medium flow channels in the interior of the electrostatic chuck, a method for controlling temperature of the workpiece during plasma processing includes circulating thermal transfer medium through the thermal transfer medium flow passages and supplying a thermally conductive gas between the workpiece and the electrostatic chuck top surface, and changing thermal transfer medium thermal conditions of thermal transfer medium flowing in the thermal transfer medium flow channels so as to change the temperature of the electrostatic chuck at a first rate limited by the thermal mass of the electrostatic chuck. The method further includes changing the backside gas pressure of the thermally conductive gas so as to change the temperature of the workpiece at a second rate faster than the first rate.

Abstract: A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

Abstract: In a temperature control system using a controlled mix of high temperature pressurized gas and a cooled vapor/liquid flow of the same medium to cool a thermal load to a target temperature in a high energy environment, particular advantages are obtained in precision and efficiency by passing at least a substantial percentage of the cooled vapor/liquid flow through the thermal load directly, and thereafter mixing the output with a portion of the pressurized gas flow. This “post load mixing” approach increases the thermal transfer coefficient, improves control and facilities target temperature change. Ad added mixing between the cooled expanded flow and a lesser flow of pressurized gas also is used prior to the input to the thermal load. A further feature, termed a remote “Line Box”, enables transport of the separate flows of the two phase medium through a substantial spacing from pressurizing and condensing units without undesired liquefaction in the transport lines.

Abstract: A compact heat exchanger for interchanging thermal energy between at least two fluids, one of which fluids may be a refrigerant in hot or cold form or in a liquid/vapor phase, and another of which fluids is a thermal transfer fluid. The heat exchanger may incorporate an internal heating element. The thermal transfer fluid is transported between two concentric metal tubes, while the refrigerant moves along a tubing helically wrapped about or between the tubes and is in thermal contact therewith.

Abstract: A method and system for surreptitiously detecting and analyzing sites suspected of transferring steganographic communications, is accomplished by analyzing a targeted site for steganographic communications via a server that directs a plurality of clients to analyze the targeted site. The clients are dispatched according to the objectives of the server and the data retrieved by previous clients, which have been directed to scan the site. The client's data is aggregated and analyzed to determine if a steganographic communication is present.

Abstract: A system and method for aggregating disparate web services and functionality via a graphical user interface, the system and method includes generating a graphical user interface. The graphical user interface includes at least one active window capable of interfacing with a plurality of remote servers and initiating multiple threads with the plurality of remote servers. The system and method aggregates the functionality and services of the plurality of remote servers, wherein the aggregated functionality and services of the plurality of remote servers is controlled via the graphical user interface.

Abstract: In a thermal control system of the type employing a two phase refrigerant that is first compressed and then is divided into a variable mass flow of refrigerant into a hot pressurized gas form and a differential remainder flow of cooled vapor derived from condensation and then thermal expansion, transitions between different temperature levels are enhanced by incremental variations of the mass flow at different control rates.

Abstract: A system for improving the thermal efficiency of a thermal control loop in which refrigerant after compression and condensation is applied to an evaporator employs a subsidiary counter-current heat exchange intercepting refrigerant flow to maintain the quality of the refrigerant by exchanging thermal energy between the input flow and the output flow from the evaporator. The same principle is effective, with particular advantage when small connections have to be made, in systems using mixed phase media and using the concept of direct energy transfer with saturated fluid.

Abstract: A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

Abstract: A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

Abstract: Systems and methods for heat exchange in accordance with the invention define adequately long-interchange distances for two fluids by wrapping a tube containing a first fluid about the wall of an inner cylindrical tank, within a gap formed with a second concentric tank. A second fluid is transmitted in the space defined between the turns of the tube and the two walls, providing effective short length thermal interchange through the tube walls. The tube is in the line contact with both tank walls and the fluids can flow rapidly over an adequately long length, so that high efficiency is provided in a low cost system.

Abstract: A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

Abstract: A system and method for controlling the temperature of thermal loads which might be controlled by refrigeration at any temperature within a wide range from −40° C. to +120° C. employs a refrigeration loop with pressure and temperature sensitive shunt paths to provide stabilized refrigerant flow so that a thermal expansion valve can operate stably only with liquid refrigerant inputs. For efficiency, thermal energy is interchanged between refrigerant returning from thermal energy exchange with a thermal load such as a cluster tool used in semiconductor fabrication and counterflow pressurized liquid refrigerant that is to be expanded for heat exchange. If the input in a suction line to the compressor is too high in temperature, a portion of pressurized refrigerant for the thermal expansion valve that is being subcooled prior to feeding to the valve is diverted into counterflow relationship with the subcooling exchange.

Abstract: The notion of a reliable semi-automatic page-changer apparatus has heretofore been elusive to inventors, however with the event of a major new handling technique, a practical solution is herein introduced. Predicated upon the principle of establishing a modular standard for the viewed paper, facilitating either sheet-music for musicians or text-pages for speakers. This involves generally utilizing the US/81/2.times.11-inch format, or the european A4/29.7.times.21 cm format, whereby any pre-existing graphic-copy can be readily and economically transferred thereto via convenient photocopy machine process and via a special hangeer-hole device, overcoming the usual disfunctional predisposition toward inter-clinging of the stacked pages. Generally using a foot-operated sequencing-switch, the instant page is transferred via a novel spindle-conveyer to a holding-stack; enabling viewing of consecutive pages either at their originating elevated position or at their final landing position there below.