Abstract: A plasma processing system is provided with diagnostic apparatus for making in-situ measurements of plasma properties. The diagnostic apparatus generally comprises a non-invasive sensor array disposed within a plasma processing chamber, an electrical circuit for stimulating the sensors, and means for recording and communicating sensor measurements for monitoring or control of the plasma process. In one form, the sensors are dynamically pulsed dual floating Langmuir probes that measure incident charged particle currents and electron temperatures in proximity to the plasma boundary or boundaries within the processing system. The plasma measurements may be used to monitor the condition of the processing plasma or furnished to a process system controller for use in controlling the plasma process.

Abstract: A plasma processing system is provided with diagnostic apparatus for making in-situ measurements of plasma properties. The diagnostic apparatus generally comprises a non-invasive sensor array disposed within a plasma processing chamber, an electrical circuit for stimulating the sensors, and means for recording and communicating sensor measurements for monitoring or control of the plasma process. In one form, the sensors are dynamically pulsed dual floating Langmuir probes that measure incident charged particle currents and electron temperatures in proximity to the plasma boundary or boundaries within the processing system. The plasma measurements may be used to monitor the condition of the processing plasma or furnished to a process system controller for use in controlling the plasma process.

Abstract: An apparatus and method for generating an autoignition substance such as DME for operating a diesel-type engine 12 with natural gas. A multi-stage reformer 18 is connected to a supply of natural gas 20 to receive a portion therefrom for production of an autoignition substance for supply to the microigniters 14 within a diesel-type engine 12. An engine control unit 24 in communication with a microcontroller 22 receives signals from sensors within the engine 12 and multi-stage reformer 18 for optimizing engine performance and generation of autoignition substances thereto. The apparatus and method of the present invention allows the operation of a diesel-type engine with natural gas as the primary or even the sole fuel by providing an autoignition substance in situ.