Patents by Inventor William W. Senseman

William W. Senseman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11615947
    Abstract: The present invention provides a magnetron system, comprising a baseplate assembly. The baseplate assembly defining a housing portion and a power feedthrough. A sputtering target is disposed within the housing portion of the baseplate assembly. An electromagnetic assembly is disposed within the housing portion of the baseplate assembly. The electromagnetic assembly comprising a plurality of electromagnet pairs and a plurality of magnet pairs, wherein the plurality of electromagnet pairs and the plurality of magnet pairs are arranged in an alternating order such that at least one electromagnet pair of the plurality of electromagnet pairs is juxtapositioned between two magnet pairs of the plurality of magnet pairs, and at least one magnet pair of the plurality of magnet pairs is juxtapositioned between two electromagnet pairs of the plurality of electromagnet pairs.
    Type: Grant
    Filed: August 20, 2021
    Date of Patent: March 28, 2023
    Assignee: OEM Group, LLC
    Inventors: Marc-Andre Lariviere, Juan M. Rios Reyes, Nitin Choudhary, Chao Li, Brendan V. Trang, Christian K. Forgey, Michael S. Correra, William W. Senseman
  • Publication number: 20220068620
    Abstract: The present invention provides a magnetron system, comprising a baseplate assembly. The baseplate assembly defining a housing portion and a power feedthrough. A sputtering target is disposed within the housing portion of the baseplate assembly. An electromagnetic assembly is disposed within the housing portion of the baseplate assembly. The electromagnetic assembly comprising a plurality of electromagnet pairs and a plurality of magnet pairs, wherein the plurality of electromagnet pairs and the plurality of magnet pairs are arranged in an alternating order such that at least one electromagnet pair of the plurality of electromagnet pairs is juxtapositioned between two magnet pairs of the plurality of magnet pairs, and at least one magnet pair of the plurality of magnet pairs is juxtapositioned between two electromagnet pairs of the plurality of electromagnet pairs.
    Type: Application
    Filed: August 20, 2021
    Publication date: March 3, 2022
    Applicant: OEM Group, LLC
    Inventors: Marc-Andre Lariviere, Juan M. Rios Reyes, Nitin Choudhary, Chao Li, Brendan V. Trang, Christian K. Forgey, Michael S. Correra, William W. Senseman