Abstract: A conveying device for thin disk-like articles (60), characterized by the llowing features: a support (10) having a plain surface (12), in the support (10) there is formed at least one gas channel (20) which channel, in running towards the plain surface in outwardly slanting manner, terminates at one of its ends in at least one gas outlet opening in the plain surface (12), the at least one gas channel being connectable to a gas supply pipe (28) at its other end, wherein at least three guiding arms (30) are disposed adjacent the at least one gas outlet opening(s) outside the at least one gas outlet opening and wherein the at least three guiding arms project beyond the plain surface (12) of the support (10) and are adjustable radially with respect to the plain surface (12).

Abstract: To prevent dripping of liquid from an outlet opening of a line, a drip suon device is assigned to the end of the line; the drip suction device has a housing which surrounds the end of the line with the formation of a chamber connected to the interior of the line via through openings and negative pressure can be applied to it via another line to suck up liquid residues which remain in the area of outlet opening after the liquid flow through the line is shut off, and a circuit to activate the drip suction device to apply negative pressure to the chamber when the liquid flow through the line is interrupted by a shutoff element assigned to the line.

Abstract: A gripper for wafer-shaped articles (silicon wafers) has several radially justable gripping claws (2). Gripping claws (2) are loaded by springs so that when an article is held they tightly adjoin its outer edge. To move gripping claws (2) to the outside, there is a spreading device (20) with conical spreading body (21). In addition, gripping claws (2) are coupled to one another such that they cannot move to the inside independently of one another and it is ensured that individual gripping claws (2) cannot move farther to the inside than other griping claws (2). This is achieved for example by conical spreading body (21) being loaded by spring (26) which keeps it continually against parts connected to gripping claws (2), for example, rollers (18) provided on their guide bodies (12). This reliably prevents individual gripping claws (2) from moving radially to the inside farther than other gripping claws (2). Thus the article is held by the gripper in a defined position to it.

Abstract: In the case of a support 1 for wafer-like object 2, which in its surface ing toward wafer-like object 2 has a ring-shaped die 8 for the discharge of compressed gas, there is a circular step 10 that is located radially outside of ring-shaped die 8. Treatment fluid 15, which is applied to the upper side of an object 2, which is secured to a support 1 that is equipped with step 10, flows around circumferential edge 16 of object 2 onto underside 17 of said object and wets an area of underside 17 of object 2 that is located radially outside of step 10 until it is blown away radially outward by the gas emerging from tubular die 8. This provides the advantage that treatment fluid 15 not only reaches circumferential edge 16 of object 2, but also reaches into a ring-shaped area of underside 17 of wafer-like object 2 that faces toward support 1 and can exert its action there.