Abstract: Improved stabilization of 1,1,1-trichloroethane is obtained by employing a free radical scavenger as a stabilizer which will trap trichloromethyl radicals, making them unavailable for formation of acidic species in the trichloroethane. Examples of such free radical scavengers include trichloroethylene, tetrachloroethylene, or fluorene. Compositions in accordance with the invention consist essentially of the 1,1,1-trichloroethane and from about 0.1 volume percent to about 5 volume percent of the free radical scavenger. In the fabrication of semiconductor devices in which the so stabilized trichloroethane is employed as a degreasing solvent, the acidity of the trichloroethane composition may be monitored, and additional free radical scavenger added to the solution to maintain the acidity within acceptable limits, thus allowing the trichloroethane to be used indefinitely.