Patents by Inventor Wim T Tel

Wim T Tel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7259829
    Abstract: A lithographic apparatus is provided that uses an array of individually controllable elements to pattern the beam of radiation. The critical dimension uniformity of a substrate patterned using the apparatus is improved by adjusting the pattern data provided to the array of individually controllable elements to compensate for process variation.
    Type: Grant
    Filed: July 26, 2004
    Date of Patent: August 21, 2007
    Assignee: ASML Netherlands B.V.
    Inventors: Arno J. Bleeker, Wim T. Tel
  • Adaptive thermal control of lithographic chemical processes
    Patent number: 6927835
    Abstract: A system, apparatus, and method for thermally controlling lithographic chemical processes is disclosed herein. The thermal control system includes a multi-zone thermal sensing unit containing a plurality of thermal sensor elements. These thermal elements are configured to detect the temperature of a plurality of pre-defined zones on the substrates. The system also includes a multi-zone thermal adjustment unit that contains a plurality of thermal coupler elements, which are configured to adjust the temperature of the pre-defined zones. The system further includes a thermal controller unit, operatively and communicatively coupled to the multi-zone thermal sensing unit and the multi-zone thermal adjustment unit.
    Type: Grant
    Filed: September 12, 2003
    Date of Patent: August 9, 2005
    Assignee: ASML Netherlands B.V.
    Inventors: Cassandra M Owen, Wim T Tel, Stephan Ewald Sinkwitz