Patents by Inventor Windy Lynn FARNSWORTH

Windy Lynn FARNSWORTH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for supporting an optical element, and method of making same
    Patent number: 8947634
    Abstract: An apparatus for supporting an optical element is provided. The apparatus includes a lens cell (1003) and a plurality of fingers (1000) coupled to the lens cell. Each finger includes a base (1012) configured to be coupled to the optical element when mounted therein, first (1006a) and second (1006b) flexures coupled at first respective ends to and extending from the base (1012) at a divergence angle between about 75 and 165 degrees, and a mounting member (1008) configured to couple together second respective ends of the first and second flexures. The mounting member thereby couples the base (1012) to the lens cell (1003).
    Type: Grant
    Filed: April 15, 2009
    Date of Patent: February 3, 2015
    Assignee: ASML Holding N.V.
    Inventors: Windy Lynn Farnsworth, Sohrab Simani
  • Lithographic apparatus, projection system and damper for use in a lithographic apparatus and device manufacturing method
    Patent number: 8625070
    Abstract: In a lithographic apparatus, dampers are provided that may be used within mounts for optical elements in order to damp the motion of the optical element relative to the component to which it is mounted.
    Type: Grant
    Filed: October 27, 2008
    Date of Patent: January 7, 2014
    Assignee: ASML Holding N.V.
    Inventors: Windy Lynn Farnsworth, Santiago E. Del Puerto, Samir A. Nayfeh
  • Apparatus for Supporting and Optical Element, and Method of Making Same
    Publication number: 20110109891
    Abstract: An apparatus for supporting an optical element is provided. The apparatus includes a lens cell (1003) and a plurality of fingers (1000) coupled to the lens cell. Each finger includes a base (1012) configured to be coupled to the optical element when mounted therein, first (1006a) and second (1006b) flexures coupled at first respective ends to and extending from the base (1012) at a divergence angle between about 75 and 165 degrees, and a mounting member (1008) configured to couple together second respective ends of the first and second flexures. The mounting member thereby couples the base (1012) to the lens cell (1003).
    Type: Application
    Filed: April 15, 2009
    Publication date: May 12, 2011
    Applicant: ASML Holding N.V.
    Inventors: Windy Lynn Farnsworth, Sohrab Simani
  • Lithographic Apparatus, Projection System And Damper for Use in a Lithographic Apparatus and Device Manufacturing Method
    Publication number: 20090180091
    Abstract: In a lithographic apparatus, dampers are provided that may be used within mounts for optical elements in order to damp the motion of the optical element relative to the component to which it is mounted.
    Type: Application
    Filed: October 27, 2008
    Publication date: July 16, 2009
    Applicant: ASML Holding N.V.
    Inventors: Windy Lynn FARNSWORTH, Santiago E. Del Puerto, Samir A. Nayfeh