Patents by Inventor Wing-Shan Ribi Leung

Wing-Shan Ribi Leung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor fabrication process parameter determination using a generative adversarial network
    Patent number: 12131103
    Abstract: A device design file and material properties are inputted into a neural network module configured to operate a generative adversarial network. A process parameter is determined based on a device design file and material properties inputs using the generative adversarial network. This can be used to provide process parameters during semiconductor device design or manufacturing.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: October 29, 2024
    Assignee: KLA Corporation
    Inventors: Anuj Pandey, Wing-Shan Ribi Leung
  • SEMICONDUCTOR FABRICATION PROCESS PARAMETER DETERMINATION USING A GENERATIVE ADVERSARIAL NETWORK
    Publication number: 20210303757
    Abstract: A device design file and material properties are inputted into a neural network module configured to operate a generative adversarial network. A process parameter is determined based on a device design file and material properties inputs using the generative adversarial network. This can be used to provide process parameters during semiconductor device design or manufacturing.
    Type: Application
    Filed: March 24, 2021
    Publication date: September 30, 2021
    Inventors: Anuj Pandey, Wing-Shan Ribi Leung
  • Using stochastic failure metrics in semiconductor manufacturing
    Patent number: 10818001
    Abstract: A stochastic calculation engine receives inputs from a semiconductor inspection tool or semiconductor review tool. The stochastic calculation engine determines abnormal locations and pattern variation from the inputs and determines stochastic failures from the inputs. An electronic data storage unit connected with the stochastic calculation engine can include a database with known stochastic behavior and known process metrology variations. The stochastic calculation engine can flag stochastic features, determine a failure rate, or determine fail probability.
    Type: Grant
    Filed: January 7, 2019
    Date of Patent: October 27, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Wing-Shan Ribi Leung, Kaushik Sah, Allen Park, Andrew Cross
  • USING STOCHASTIC FAILURE METRICS IN SEMICONDUCTOR MANUFACTURING
    Publication number: 20200082523
    Abstract: A stochastic calculation engine receives inputs from a semiconductor inspection tool or semiconductor review tool. The stochastic calculation engine determines abnormal locations and pattern variation from the inputs and determines stochastic failures from the inputs. An electronic data storage unit connected with the stochastic calculation engine can include a database with known stochastic behavior and known process metrology variations. The stochastic calculation engine can flag stochastic features, determine a failure rate, or determine fail probability.
    Type: Application
    Filed: January 7, 2019
    Publication date: March 12, 2020
    Inventors: Wing-Shan Ribi Leung, Kaushik Sah, Allen Park, Andrew Cross