Patents by Inventor WINKLER Bernhard

WINKLER Bernhard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Micro-Electromechanical System Devices
    Publication number: 20130330870
    Abstract: Micro-electromechanical system (MEMS) devices and methods of manufacture thereof are disclosed. In one embodiment, a MEMS device includes a semiconductive layer disposed over a substrate. A trench is disposed in the semiconductive layer, the trench with a first sidewall and an opposite second sidewall. A first insulating material layer is disposed over an upper portion of the first sidewall, and a conductive material disposed within the trench. An air gap is disposed between the conductive material and the semiconductive layer.
    Type: Application
    Filed: November 26, 2012
    Publication date: December 12, 2013
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Karlheinz Mueller, Robert GRUENBERGER, WINKLER Bernhard