Abstract: In one embodiment, a switch includes first and second mated substrates defining therebetween a number of cavities. A plurality of electrically conductive elements extends to near at least a first of the cavities. A switching fluid, held within at least the first of the cavities, serves to electrically, but not physically, couple and decouple at least a pair of the electrically conductive elements, in response to forces that are applied to the switching fluid. A passivation layer covers at least a first of the electrically conductive elements and i) separates the first of the electrically conductive elements from at least the first of the cavities, and ii) is a dielectric for a capacitor formed between the first of the electrically conductive elements and the switching fluid. Other switches, and methods for making same, are also disclosed.

Abstract: In one embodiment, a switch includes first and second mated substrates defining therebetween a number of cavities. A plurality of electrically conductive elements extends to near at least a first of the cavities. A switching fluid, held within at least the first of the cavities, serves to electrically, but not physically, couple and decouple at least a pair of the electrically conductive elements, in response to forces that are applied to the switching fluid. A passivation layer covers at least a first of the electrically conductive elements and i) separates the first of the electrically conductive elements from at least the first of the cavities, and ii) is a dielectric for a capacitor formed between the first of the electrically conductive elements and the switching fluid. Other switches, and methods for making same, are also disclosed.