Abstract: An interface device for performing off-chip coupling in optical waveguides includes an optical waveguide core for propagating light of a particular wavelength or a plurality of wavelengths and an array of radiative elements configured to change the propagation direction of the light. The optical waveguide core is configured to control the effective refractive index of the propagation mode of the light. The device can thus serve as an optical antenna for coupling between a waveguide mode and a free-space propagating beam or a plurality of free-space propagating beams in an arrayed configuration.

Abstract: An antenna device for performing off-chip light coupling comprising an array of radiating elements whose thickness is larger than ?/2, the radiating elements being chosen such that the length of the array is smaller than 10?, where ? is the wavelength of light in the material chosen for the radiating elements. An advantage of this method is that, unlike in conventional waveguide grating antenna, by reducing the number of the radiating elements in the array, the dependence of the off-chip emission angle on the wavelength of light can be greatly reduced. Another advantage is that by using thick radiating elements the antenna efficiency can be greatly enhanced, thereby compensating for the reduced efficiency occurring as a consequence of using only a small number of radiating elements in the array.

Abstract: In one embodiment, an optical directional coupler includes an input terminal configured to receive an input optical signal and a first coupler optically coupled to the input terminal, where the first coupler has a first coupling length, and where the first coupler is configured to couple a first portion of the input optical signal to a first optical leg and a second optical portion of the input optical signal to a second optical leg. The optical directional coupler also includes the first optical leg, where the first optical leg is configured to phase shift the first portion of the optical signal to produce a first phase shift signal and the second optical leg, where the second optical leg is configured to phase shift the second portion of the optical signal to produce a second phase shift signal, and where the first phase shift signal has a phase difference relative to the second phase shift signal.

Abstract: In one embodiment, an optical phase shifter includes a first waveguide phase shifter and a second waveguide phase shifter. The optical phase shifter also includes a first polarization rotator optically coupled between the first waveguide phase shifter and the second waveguide phase shifter, where the first waveguide phase shifter, second waveguide phase shifter, and first polarization rotator are integrated on a single substrate.

Abstract: In one embodiment, an optical phase shifter includes a first phase-shifter configured to phase shift a transverse electric (TE) component of an optical signal by a first phase-shift to produce a TE component of a first signal, and a transverse magnetic (TM) component of the optical signal by a second phase-shift to produce a TM component of the first signal. The optical phase-shifter includes a polarization-rotator configured to rotate the TE component of the first signal to produce a TM component of a rotated signal, and the TM component of the first signal to produce a TE component of the rotated signal. The optical phase-shifter includes a second phase-shifter configured to phase-shift a TE component of the rotated signal by a third phase-shift, and the TM component of the rotated signal by a fourth phase-shift, where the first phase-shifter, the polarization-rotator, and the second phase-shifter are integrated on a substrate.

Abstract: In one embodiment, an optical directional coupler includes an input terminal configured to receive an input optical signal and a first coupler optically coupled to the input terminal, where the first coupler has a first coupling length, and where the first coupler is configured to couple a first portion of the input optical signal to a first optical leg and a second optical portion of the input optical signal to a second optical leg. The optical directional coupler also includes the first optical leg, where the first optical leg is configured to phase shift the first portion of the optical signal to produce a first phase shift signal and the second optical leg, where the second optical leg is configured to phase shift the second portion of the optical signal to produce a second phase shift signal, and where the first phase shift signal has a phase difference relative to the second phase shift signal.

Abstract: In one embodiment, an optical phase shifter includes a first phase-shifter configured to phase shift a transverse electric (TE) component of an optical signal by a first phase-shift to produce a TE component of a first signal, and a transverse magnetic (TM) component of the optical signal by a second phase-shift to produce a TM component of the first signal. The optical phase-shifter includes a polarization-rotator configured to rotate the TE component of the first signal to produce a TM component of a rotated signal, and the TM component of the first signal to produce a TE component of the rotated signal. The optical phase-shifter includes a second phase-shifter configured to phase-shift a TE component of the rotated signal by a third phase-shift, and the TM component of the rotated signal by a fourth phase-shift, where the first phase-shifter, the polarization-rotator, and the second phase-shifter are integrated on a substrate.

Abstract: Various embodiments for etching of silicon nitride (SixNy) lightpipes, waveguides and pillars, fabricating photodiode elements, and integration of the silicon nitride elements with photodiode elements are described. The results show that the quantum efficiency of the photodetectors (PDs) can be increased using vertical silicon nitride vertical waveguides.

Abstract: Various embodiments for etching of silicon nitride (SixNy) lightpipes, waveguides and pillars, fabricating photodiode elements, and integration of the silicon nitride elements with photodiode elements are described. The results show that the quantum efficiency of the photodetectors (PDs) can be increased using vertical silicon nitride vertical waveguides.

Abstract: Methods, apparatuses, systems, and devices relating to the fabrication of features for semiconductor devices are disclosed. The features may include vias and pillars. In some implementations, the vias may define light pipes for semiconductor image sensor devices that serve to guide electromagnetic radiation directly down to photodiodes or other radiation detecting elements formed on an underlying silicon substrate. These structures significantly improve the light collection efficiency and reduce the scattering and crosstalk losses in the dielectric layer. An etch mask may be used to produce features through a subsequent etching process. More specifically, the etch mask defines sidewalls in the glass layer, provides excellent dry etch resistance, and enables easy lift-off of the etch mask from the glass layer. Two embodiments are disclosed herein: the first using amorphous silicon as the etch mask; and the second employing a photoresist as the etch mask.