Abstract: An inkjet printhead that has a supporting substrate, a conductive layer deposited in a pattern on one side of the supporting substrate, an insulating layer deposited such that the conductive layer is between the insulating layer and the supporting substrate, an ink chamber supported on the supporting substrate such that the conductive layer is between the ink chambers and the supporting substrate, a nozzle in fluid communication with the ink chamber, a heater on the insulating layer configured to vaporize some ink in the ink chamber such that a droplet of ink is ejected through the nozzle, the heater having a resistive element extending between a pair of contacts and, at least one metallic via in each of the contacts respectively, the metallic vias extending through the insulating layer to establish and electrical connection between the conductive layer and the contacts. The insulating layer has a planar surface on which the heater is supported.

Abstract: An inkjet printhead includes a bi-layered nozzle plate having a plurality of nozzle apertures. The bi-layered nozzle plate being includes a lower first nozzle plate formed from a first material and an upper second nozzle plate disposed on the first nozzle plate, the second nozzle plate being formed from a second material. The first and second materials are different from each other and are each independently selected from the group consisting of: silicon nitride, silicon oxide and silicon oxynitride.

Abstract: A method of fabricating an inkjet printhead is provided in which a supporting substrate is provided, a conductive layer is deposited and patterned on one side of the supporting substrate, an insulating layer is deposited on the conductive layer, holes are etched through the insulating layer to the conductive layer, metal is deposited in the holes to form metallic vias, an outer surface of the insulating layer and one end of each of the metallic vias are planarized, and a layer of heater material is deposited and patterned on the outer surface to form a heater with a resistive element extending between a pair of contacts. The metallic vias electrically connect the contacts to the conductive layer.

Abstract: An inkjet printhead includes a bi-layered nozzle plate having a plurality of nozzle apertures. The bi-layered nozzle plate being includes a lower first nozzle plate formed from a first material and an upper second nozzle plate disposed on the first nozzle plate, the second nozzle plate being formed from a second material. The first and second materials are different from each other and are each independently selected from the group consisting of: silicon nitride, silicon oxide and silicon oxynitride.

Abstract: An inkjet printhead with first and second nozzle plates. The first nozzle plate is comprised of a first material spanning a plurality of nozzles. The first nozzle plate has a plurality of cavities filled with a filler such that an upper surface of the first nozzle plate and an upper surface of the filler together define a contiguous planar surface. The second nozzle plate is comprised of a second material disposed on the planar surface.

Abstract: An inkjet printhead comprising a reinforced bi-layered nozzle plate structure spanning across a plurality of nozzles is provided. Typically, the nozzle plate structure comprises: a first nozzle plate spanning a plurality of nozzles, the first nozzle plate having a plurality of cavities defined therein; photoresist filling the cavities; and a second nozzle plate covering said the first nozzle plate and the photoresist.

Abstract: An inkjet printhead that has a supporting substrate, a conductive layer deposited in a pattern on one side of the supporting substrate, an insulating layer deposited such that the conductive layer is between the insulating layer and the supporting substrate, an ink chamber supported on the supporting substrate such that the conductive layer is between the ink chambers and the supporting substrate, a nozzle in fluid communication with the ink chamber, a heater on the insulating layer configured to vaporize some ink in the ink chamber such that a droplet of ink is ejected through the nozzle, the heater having a resistive element extending between a pair of contacts and, at least one metallic via in each of the contacts respectively, the metallic vias extending through the insulating layer to establish and electrical connection between the conductive layer and the contacts. The insulating layer has a planar surface on which the heater is supported.

Abstract: A method of fabricating an inkjet printhead is provided in which a supporting substrate is provided, a conductive layer is deposited and patterned on one side of the supporting substrate, an insulating layer is deposited on the conductive layer, holes are etched through the insulating layer to the conductive layer, metal is deposited in the holes to form metallic vias, an outer surface of the insulating layer and one end of each of the metallic vias are planarized, and a layer of heater material is deposited and patterned on the outer surface to form a heater with a resistive element extending between a pair of contacts. The metallic vias electrically connect the contacts to the conductive layer.

Abstract: An inkjet printhead with first and second nozzle plates. The first nozzle plate is comprised of a first material spanning a plurality of nozzles. The first nozzle plate has a plurality of cavities filled with a filler such that an upper surface of the first nozzle plate and an upper surface of the filler together define a contiguous planar surface. The second nozzle plate is comprised of a second material disposed on the planar surface.

Abstract: A method of fabricating an inkjet printhead is provided. The method comprises the steps of: (a) providing a partially-fabricated printhead having a first nozzle plate comprised of a first material spanning a plurality of nozzles, the first nozzle plate having a plurality of cavities; (b) filling the cavities with a filler, such that an upper surface of the first nozzle plate and an upper surface of the filler together define a contiguous planar surface; and (c) depositing a second material onto the planar surface to form a second nozzle plate having a planar exterior surface.

Abstract: An inkjet printhead comprising a reinforced bi-layered nozzle plate structure spanning across a plurality of nozzles is provided. Typically, the nozzle plate structure comprises: a first nozzle plate spanning a plurality of nozzles, the first nozzle plate having a plurality of cavities defined therein; photoresist filling the cavities; and a second nozzle plate covering said the first nozzle plate and the photoresist.

Abstract: A method of fabricating an inkjet printhead is provided. The method comprises the steps of: (a) providing a partially-fabricated printhead having a first nozzle plate comprised of a first material spanning a plurality of nozzles, the first nozzle plate having a plurality of cavities; (b) filling the cavities with a filler, such that an upper surface of the first nozzle plate and an upper surface of the filler together define a contiguous planar surface; and (c) depositing a second material onto the planar surface to form a second nozzle plate having a planar exterior surface.