Patents by Inventor Witold Slowko

Witold Slowko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7531812
    Abstract: A system detects electrons according to their emission direction in a scanning electron microscope. The system includes a scintillator electron detector and a set of electrodes focusing and controlling the electron flow. At least in two sectors of the electron flow from the sample stage (7) to the scintillator (3), sector flow control electrodes (9) are placed and supplied alternatively with electric pulses. The sector flow control electrodes (9) may be made of a metal grid or in a shape of conducting plates or deposited on the surface of a microporous plate in the form of a thin conductive layer.
    Type: Grant
    Filed: April 25, 2006
    Date of Patent: May 12, 2009
    Assignee: Politechnika Wroclawska
    Inventor: Witold Slowko
  • Patent number: 7470915
    Abstract: A system for detecting secondary and backscattered electrons in a scanning electron microscope includes a microporous plate (9) that is disposed between a lower scintillator (5) and an upper scintillator (12). The lower scintillator (5) faces toward a specimen stage (11). A movable diaphragm (14) having an aperture (15) is located between the front end of a photomultiplier (7) and the respective ends of an upper light guide (13) and lower light guide (6). Inside an intermediate chamber (3), at least one focusing electrode (8) is placed, with its hole positioned coaxially with the hole in the microporous plate (9). The focusing electrode (8) is located on the surface of the lower scintillator (5).
    Type: Grant
    Filed: April 14, 2006
    Date of Patent: December 30, 2008
    Assignee: Politechnika Wroclawska
    Inventor: Witold Slowko
  • Patent number: 7425708
    Abstract: The secondary electron detector unit for a scanning electron microscope is mounted in a head body (1). In the lower part of the head body (1), a lower throttling aperture (2) is placed. Above the lower throttling aperture (2), the microporous plate (3) is sealed in the head body (1) by a gasket (5) and fastened with the use of the frame plate (6) which has an opening that exposes the active input area (7) placed asymmetrically with respect to the axis of the scanning electron beam (WE). Above the microporous plate (3), the scintillator (11) and the light pipe (12) are fixed at the side of the head body (1).
    Type: Grant
    Filed: October 13, 2005
    Date of Patent: September 16, 2008
    Assignee: Politechnika Wrolawska
    Inventor: Witold Slowko
  • Publication number: 20060249686
    Abstract: A system detects electrons according to their emission direction in a scanning electron microscope. The system includes a scintillator electron detector and a set of electrodes focusing and controlling the electron flow. At least in two sectors of the electron flow from the sample stage (7) to the scintillator (3), sector flow control electrodes (9) are placed and supplied alternatively with electric pulses. The sector flow control electrodes (9) may be made of a metal grid or in a shape of conducting plates or deposited on the surface of a microporous plate in the form of a thin conductive layer.
    Type: Application
    Filed: April 25, 2006
    Publication date: November 9, 2006
    Inventor: Witold Slowko
  • Publication number: 20060249674
    Abstract: A system for detecting secondary and backscattered electrons in a scanning electron microscope includes a microporous plate (9) that is disposed between a lower scintillator (5) and an upper scintillator (12). The lower scintillator (5) faces toward a specimen stage (11). A movable diaphragm (14) having an aperture (15) is located between the front end of a photomultiplier (7) and the respective ends of an upper light guide (13) and lower light guide (6). Inside an intermediate chamber (3), at least one focusing electrode (8) is placed, with its hole positioned coaxially with the hole in the microporous plate (9). The focusing electrode (8) is located on the surface of the lower scintillator (5).
    Type: Application
    Filed: April 14, 2006
    Publication date: November 9, 2006
    Inventor: Witold Slowko
  • Publication number: 20060027748
    Abstract: The secondary electron detector unit for a scanning electron microscope is mounted in a head body (1). In the lower part of the head body (1), a lower throttling aperture (2) is placed. Above the lower throttling aperture (2), the microporous plate (3) is sealed in the head body (1) by a gasket (5) and fastened with use of the frame plate (6) which has an opening that exposes the active input area (7) placed asymmetrically with respect to the axis of the scanning electron beam (WE). Above the microporous plate (3), the scintillator (11) and the light pipe (12) are fixed at the side of the head body (1).
    Type: Application
    Filed: October 13, 2005
    Publication date: February 9, 2006
    Inventor: Witold Slowko