Abstract: A power supply arrangement for a plurality of plasma generators includes a power input connection, a data connection, and an AC generator stage configured to convert a power from the power input connection into an AC power. The power supply arrangement is configured to ensure that the AC power is supplied to a first load as a first AC power and to a second load spatially remote from the first load as a second AC power, not simultaneously. The power supply arrangement is controllable in such a way that the first AC power and the second AC power have different characteristics in one or more of output current, output voltage, output frequency, output power, or output profile of current and/or voltage, and is configured to output a drive signal for an impedance matching apparatus assigned to one of the first AC power and the second AC power.

Abstract: A method of plasma processing a substrate in a plasma chamber is provided. The method includes the steps of supplying a power supply signal to electrodes arranged within the plasma chamber in order to form a plasma in the plasma chamber, monitoring at least one parameter related to the plasma processing, determining a feature related to the at least one monitored parameter, and adjusting the power supply signal during the plasma processing to modify, in particular reduce, the feature. The modification of the feature eliminates or mitigates formation of crazing on the substrate.

Abstract: A plasma power supply system for a plasma processing system is provided. The plasma processing system includes a first plasma source and a second plasma source in adjacent sections of a plasma chamber. The plasma processing system is configured in such a way that in different sections different materials are deposited. A substrate is processed by a plasma in the plasma chamber. The power supply system includes a first power supply configured to supply a first AC power to the first plasma source, a second power supply configured to supply a second AC power to the second plasma source, a first sensor for monitoring a plasma process parameter of the first plasma source, a control unit configured to determine a first operating data related to the plasma process parameter, and control the second power supply based on the first operating data in order to decrease crazing on the substrate.

Abstract: Systems, methods, and computer readable media related to generating query variants for a submitted query. In many implementations, the query variants are generated utilizing a generative model. A generative model is productive, in that it can be utilized to actively generate a variant of a query based on application of tokens of the query to the generative model, and optionally based on application of additional input features to the generative model.

Abstract: Systems, methods, and computer readable media related to generating query variants for a submitted query. In many implementations, the query variants are generated utilizing a generative model. A generative model is productive, in that it can be utilized to actively generate a variant of a query based on application of tokens of the query to the generative model, and optionally based on application of additional input features to the generative model.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for performing a machine learning task on a network input to generate a network output. In one aspect, one of the systems includes a neural network configured to perform the machine learning task, the neural network including one or more sparse attention layers.

Abstract: A method of plasma processing a substrate in a plasma chamber is provided. The method includes the steps of supplying a power supply signal to electrodes arranged within the plasma chamber in order to form a plasma in the plasma chamber, monitoring at least one parameter related to the plasma processing, determining a feature related to the at least one monitored parameter, and adjusting the power supply signal during the plasma processing to modify, in particular reduce, the feature. The modification of the feature eliminates or mitigates formation of crazing on the substrate.

Abstract: Systems, methods, and computer readable media related to generating query variants for a submitted query. In many implementations, the query variants are generated utilizing a generative model. A generative model is productive, in that it can be utilized to actively generate a variant of a query based on application of tokens of the query to the generative model, and optionally based on application of additional input features to the generative model.

Abstract: Methods, systems, and apparatus, including computer program products, for constructing text classifiers. The method includes receiving a collection of candidate phrases for a given topic; filtering the received candidate phrases to remove erroneously included candidate phrases; assigning weights to the candidate phrases including scoring each candidate phrase using an initial classifier and assigning weights to the candidate phrases based on the scores; and generating a linear classifier using the filtered and weighted candidate phrases, where the linear classifier varies the weights for each phrase candidate depending on the length of the document being classified.

Abstract: Methods, systems, and apparatus, including computer program products, for constructing text classifiers. The method includes receiving a collection of candidate phrases for a given topic; filtering the received candidate phrases to remove erroneously included candidate phrases; assigning weights to the candidate phrases including scoring each candidate phrase using an initial classifier and assigning weights to the candidate phrases based on the scores; and generating a linear classifier using the filtered and weighted candidate phrases, where the linear classifier varies the weights for each phrase candidate depending on the length of the document being classified.

Abstract: Methods, systems, and apparatus, including computer program products, for constructing text classifiers. The method includes receiving a collection of candidate phrases for a given topic; filtering the received candidate phrases to remove erroneously included candidate phrases; assigning weights to the candidate phrases including scoring each candidate phrase using an initial classifier and assigning weights to the candidate phrases based on the scores; and generating a linear classifier using the filtered and weighted candidate phrases, where the linear classifier varies the weights for each phrase candidate depending on the length of the document being classified.