Patents by Inventor Wojciech Glazek

Wojciech Glazek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma impedance matching for supplying RF power to a plasma load
    Patent number: 10410835
    Abstract: A plasma impedance matching unit for a plasma power supply system includes a first power connector for coupling the matching unit to a RF power source, a second power connector for coupling the matching unit to a plasma load, a data link interface for directly coupling the matching unit to another plasma impedance matching unit via a data link, and a controller configured to control the matching unit to match an impedance from the first power connector to an impedance at the second power connector, to operate as a master for at least one other impedance matching unit and/or at least one RF power source of the plasma power supply system, and to communicate via the data link interface with the at least one other impedance matching unit and/or the at least one RF power source of the plasma power supply system.
    Type: Grant
    Filed: November 3, 2017
    Date of Patent: September 10, 2019
    Assignee: TRUMPF Huettinger Sp. z o. o.
    Inventors: Wojciech Glazek, Rafal Bugyi
  • Plasma Impedance Matching for Supplying RF Power to a Plasma Load
    Publication number: 20180053633
    Abstract: A plasma impedance matching unit for a plasma power supply system includes a first power connector for coupling the matching unit to a RF power source, a second power connector for coupling the matching unit to a plasma load, a data link interface for directly coupling the matching unit to another plasma impedance matching unit via a data link, and a controller configured to control the matching unit to match an impedance from the first power connector to an impedance at the second power connector, to operate as a master for at least one other impedance matching unit and/or at least one RF power source of the plasma power supply system, and to communicate via the data link interface with the at least one other impedance matching unit and/or the at least one RF power source of the plasma power supply system.
    Type: Application
    Filed: November 3, 2017
    Publication date: February 22, 2018
    Inventors: Wojciech Glazek, Rafal Bugyi