Abstract: An arrangement for coupling microwave energy into a plasma CVD coating chamber (3) disposed in a cavity resonator (1) has a microwave feed (11) and a microwave waveguide (9, 1). So that a plastic container of a size and configuration which differ to a certain degree can be effectively coated in its interior, it is provided that the arrangement is of a substantially cylindrical structure, such that provided at the rear end is a first coaxial waveguide (in the region a) with an internal conductor in the form of an antenna (12), an approximately cylindrical waveguide (in the region b) follows in the centre of the arrangement and provided at the front end (in the region c) is a second coaxial waveguide (1) with internal conductor (13), wherein gas can be introduced through a gas feed tube (13) into the second coaxial waveguide (in the region c), which gas can be activated into the plasma state by the coupled-in microwave energy, and wherein a TM-mode is produced by the antenna (12) in the plasma region (1, c).

Abstract: The invention relates to an arrangement for coupling microwave energy into a plasma CVD coating chamber (3) located in a cavity resonator (1). Said arrangement has a microwave supply part (11) and a microwave guide (9, 1). The invention provides that in order to coat the insides of plastic containers of shapes and sizes that differ to a certain extent, the arrangement has an essentially cylindrical construction as follows: a first coaxial waveguide (in area a) is provided with an inner guide at the rear end, said inner guide being configured as an antenna (12). An approximately cylindrical waveguide (in area b) is connected in the middle and a second coaxial waveguide (1) is provided with an inner guide (13) at the front end (in area c). Gas can be introduced into the second coaxial waveguide (in area c) through a gas supply tube (13). Said gas is excited into a plasma state by the microwave energy that is coupled in and a TM mode is generated in the plasma range (1, c) by the antenna (12).

Abstract: A device for coupling microwave energy into a treatment chamber (3) which is arranged in a hollow body (2), whereby said treatment chamber is a plasma CVD coating chamber for coating the inner wall of a hollow body (2). The inventive device comprises a microwave source, a microwave coupling device (10) and a microwave conductor (1,9). A gas supply tube (13) can be inserted into said hollow body (2) in such a way that a process gas can be activated into a plasma state by the coupled microwave energy.