Patents by Inventor Wolfgang Augstein

Wolfgang Augstein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4452881
    Abstract: The invention relates to a method of adjusting the edge angle of openings that are etched in a polysilicon layer.The steepness of the edge angles can be adjusted by means of a treatment of the polysilicon layer prior to the making of the photoresist mask with a mixture of 5 parts water and 1 to 3 parts ammonia and 0.25 to 1 part hydrogen peroxide. This pre-treatment is advantageously carried out at a temperature between 40.degree. and 70.degree. C.
    Type: Grant
    Filed: May 16, 1983
    Date of Patent: June 5, 1984
    Assignee: International Business Machines Corporation
    Inventors: Wolfgang Augstein, Peter Frasch, Blanka Ivancic, Markus A. Zuegel
  • Patent number: 3993490
    Abstract: Direct positive film with incorporated developer having improved sensitometric properties and storage stability is obtained with a developer combination of hydroquinone monosulfonate and a superadditive developer of the 3-pyrazolidone or the N-methyl-p-aminophenol sulfate types.
    Type: Grant
    Filed: February 6, 1975
    Date of Patent: November 23, 1976
    Assignee: E. I. Du Pont de Nemours and Company
    Inventors: Manfred Schober, Wolfgang A. Augstein