Abstract: A corpuscular radiation device for producing an irradiation pattern on a kpiece by means of a beam emitted from a first radiation source and a first corpuscular-optical lens system suited for forming said beam is provided. The corpuscular-optical lens system includes means for adjusting the workpiece having opposed major surfaces, an at least partially beam-transparent reference object and a free beam passage opening. At the side of the workpiece remote from the first radiation source there is provided a second corpuscular-optical lens system including a beam switch, a second radiation source, an image receiver with a receiver surface, and a detector.

Abstract: A chromatically corrected deflecting device for particle-beam equipment, particularly electron-beam equipment, comprises an electric deflecting field and a magnetic deflecting field which are simultaneously employed for the deflection of a beam. The two deflecting fields are normal to each other and are oriented relative to each other in such a manner that the beam deflections due to the associated deflecting fields occur in one and the same plane, i.e. in the plane containing the undeflected beam. The electric deflection is at the same time directed in opposition to the magnetic deflection.