Abstract: A method and a device examine a sample with radiation emitted from a radiation source, which is directed to the sample carried by a sample holder via a beamforming unit and detected by a detector and evaluated in an evaluating unit. Prior to the examination of the sample, at least one of the following components, including the radiation source, beamforming unit, sample holder, detector, and a primary beam stop, are spatially oriented and/or positioned in relation to at least one of the other components and/or in relation to a predefined fixed point and/or in relation to the optical path with a control unit via actuating drives. The radiation intensity measured by the detector, in a predefined detector range, and/or a value derived therefrom is used for establishing a control variable conferred from the control unit to the actuating drives assigned to the components.

Abstract: A method and a device examine a sample with radiation emitted from a radiation source, which is directed to the sample carried by a sample holder via a beam-forming unit and detected by a detector and evaluated in an evaluating unit. Prior to the examination of the sample, at least one of the following components, including the radiation source, beam-forming unit, sample holder, detector, and a primary beam stop, are oriented and/or positioned in terms of spatial location in relation to at least one of the other components and/or in relation to a predefined fixed point and/or in relation to the optical path with a control unit via actuating drives. The radiation intensity measured by the detector, in a predefined detector range, and/or a value derived therefrom is used for establishing a control variable conferred from the control unit to the actuating drives assigned to the components.