Patents by Inventor Wolfgang Max Adolf Bernhard OSTEN

Wolfgang Max Adolf Bernhard OSTEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
    Patent number: 8804123
    Abstract: Determining line edge roughness comprises reflecting at least one radiation beam off the object, observing a first optical response signature from a beam reflected from the object, or a component thereof, being polarized with an electrical vector in a first orientation relative to the object; and observing a second optical response signature from a beam reflected from the object, or a component thereof, being polarized with an electrical vector in a second orientation relative to the object. Line edge roughness can then be determined from the two optical response signatures.
    Type: Grant
    Filed: April 27, 2012
    Date of Patent: August 12, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Wolfgang Max Adolf Bernhard Osten, Karsten Frenner, Bartosz Jan Bilski
  • Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
    Publication number: 20130050700
    Abstract: Determining line edge roughness comprises reflecting at least one radiation beam off the object, observing a first optical response signature from a beam reflected from the object, or a component thereof, being polarized with an electrical vector in a first orientation relative to the object; and observing a second optical response signature from a beam reflected from the object, or a component thereof, being polarized with an electrical vector in a second orientation relative to the object. Line edge roughness can then be determined from the two optical response signatures.
    Type: Application
    Filed: April 27, 2012
    Publication date: February 28, 2013
    Applicant: ASML Netherlands B.V.
    Inventors: Wolfgang Max Adolf Bernhard OSTEN, Karsten Frenner, Bartosz Jan Bilski