Patents by Inventor Wolfgang Pilz

Wolfgang Pilz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Emitter for an ion source and method of producing same
    Patent number: 7696489
    Abstract: An emitter for a liquid metal ion source is provided. The emitter includes a wire comprising a substantially curved portion and a surface wherein at least a portion of the wire surface is tapered at the substantially curved portion to form an emitter tip. Furthermore, a manufacturing method for such an emitter is provided.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: April 13, 2010
    Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
    Inventors: Wolfgang Pilz, Lothar Bischoff
  • Emitter for an ion source
    Patent number: 7335896
    Abstract: An emitter for an ion source, such as a liquid metal alloy ion source (LMAIS). The emitter includes a binary alloy PrSi as a source material.
    Type: Grant
    Filed: July 26, 2005
    Date of Patent: February 26, 2008
    Assignee: ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventors: Wolfgang Pilz, Lothar Bischoff
  • Emitter for an ion source and method of producing same
    Publication number: 20070034399
    Abstract: An emitter for a liquid metal ion source is provided. The emitter includes a wire comprising a substantially curved portion and a surface wherein at least a portion of the wire surface is tapered at the substantially curved portion to form an emitter tip. Furthermore, a manufacturing method for such an emitter is provided.
    Type: Application
    Filed: July 27, 2006
    Publication date: February 15, 2007
    Inventors: Wolfgang Pilz, Lothar Bischoff
  • Emitter for an ion source
    Publication number: 20060022143
    Abstract: An emitter for an ion source, such as a liquid metal alloy ion source (LMAIS). The emitter includes a binary alloy PrSi as a source material.
    Type: Application
    Filed: July 26, 2005
    Publication date: February 2, 2006
    Inventors: Wolfgang Pilz, Lothar Bischoff