Abstract: A structured layer arrangement includes a planar carrier substrate, on the functional-effective side of which a structured chromium layer is arranged. This includes chromium areas alternating with uncoated areas of the carrier substrate. Above the chromium layer, a two-dimensional reactive layer is arranged, which has a higher photocatalytic activity in partial areas above the chromium areas than in partial areas above the uncoated areas of the carrier substrate.

Abstract: A method and device for detecting an incorrect position of a semiconductor wafer during a high-temperature treatment of the semiconductor water in a quartz chamber which is heated by IR radiators, has the semiconductor wafer lying on a rotating support and being held at a specific temperature with the aid of a control system. Thermal radiation which is emitted by the semiconductor wafer and the IR radiators is recorded using a pyrometer. The radiation temperature of the recorded thermal radiation is determined. The semiconductor wafer is assumed to be in an incorrect position if the temperature of the recorded thermal radiation fluctuates to such an extent over the course of time that the fluctuation width lies outside a fluctuation range &Dgr;T which is regarded as permissible.