Abstract: A charged particle source comprises at least one gas inlet configured to supply gas particles, at least one tip having a tip apex being biased to provide an electrical field for generating charged particles, and at least one ionization area to which gas particles are supplied. The gas particles are ionized in the ionization area due to the electrical field. Additionally, the charged particle source comprises at least one first electrode configured to accelerate charged particles and at least one light emitting device providing a light beam. The light beam is focused to a focus point in the ionization area, specifically, to a focus volume such that the ionization area is at least partly positioned in the focus volume. The ionization area is arranged between the tip apex and the first electrode. The distance between the ionization area and the tip apex may be from 0.1 nm to 1 nm.

Abstract: A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to counteract the charge buildup on the object. A gas is supplied to convey the charge away from the surface and/or to neutralize it.

Abstract: A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.

Abstract: A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.

Abstract: An internal paneling part conceals a passage area of an airbag. The internal paneling part includes a planar carrier and a textile fabric covering at least part of the passage area. The textile fabric includes at least one initial weakening for tearing along a defined tear line to release the airbag. The defined tear line runs along an X direction, with the textile fabric having a further tearing force in the X direction that is less than in any other direction.

Abstract: A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to counteract the charge buildup on the object. A gas is supplied to convey the charge away from the surface and/or to neutralize it.

Abstract: A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.

Abstract: A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.

Abstract: Described is an interior trim part for covering an airbag, which may include a two-dimensional carrier, a surface decor and a foamed intermediate layer. A through-opening for the airbag is recessed in the carrier, and an inlay covering the through-opening is applied into the intermediate layer, such that the inlay projects beyond an edge of the through-opening on one side and there, in an overlapping region of the inlay and of the carrier, serves as a hinge for an airbag flap formed by the surface decor and the intermediate layer with the inlay. Furthermore, with a folding open of the airbag flap, an energy amount which is dependent on the intensity of an opening impact of the airbag, may be absorbed by way of a release of the intermediate layer with the inlay from the carrier, away from the edge in the overlapping region.