Abstract: A method for producing a component, especially a micromechanical, micro-electro-mechanical or micro-opto-electro-mechanical component, as well as such a component which has an active structure that is embedded in a layer structure. Strip conductor bridges are formed by etching first and second depressions having a first and second, different etching depth into a covering layer of a first layer combination that additionally encompasses a substrate and an insulation layer. The deeper depression is used for insulating the strip conductor bridge while the shallower depression provides a moving space for the active structure with the moving space being bridged by the strip conductor bridge.

Abstract: A method for fabricating a microelectromechanical or microoptoelectromechanical component. The method includes producing first and second layer composites. The first has a first substrate and a first insulation layer, which covers at least one part of the surface of the first substrate, while the second has a second substrate and a second insulation layer, which covers at least one part of the surface of the second substrate. An at least partly conductive structure layer is applied to the first insulation layers and the second composite is applied to the structure layer so that the second insulation layer adjoins the structure layer. The first and second layer composites and the structure layer are configured so that at least one part of the structure layer that comprises the active area of the microelectromechanical or microoptoelectromechanical component is hermetically tightly sealed by the first and second layer composites.

Abstract: A rotation rate sensor comprises a substrate and two structures which move relative to the substrate on a design plane (x-y), with the two moving structures being coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction (x) on the design plane (x-y) as excitation mode. The coupled structure has a second oscillation mode as a detection mode which is excited by Coriolis accelerations when the first oscillation mode is excited and on rotation about a sensitive axis (z) of the rotation rate sensor. The sensitive axis is at right angles to the design plane (x-y), and the coupled structure is designed such that, subject to optimal preconditions, it does not have any oscillation mode which can be excited by linear accelerations of the rotation rate sensor in a direction parallel to the second axis.

Abstract: A method for producing a component, especially a micromechanical, micro-electro-mechanical or micro-opto-electro-mechanical component, as well as such a component which has an active structure that is embedded in a layer structure. Strip conductor bridges are formed by etching first and second depressions having a first and second, different etching depth into a covering layer of a first layer combination that additionally encompasses a substrate and an insulation layer. The deeper depression is used for insulating the strip conductor bridge while the shallower depression provides a moving space for the active structure with the moving space being bridged by the strip conductor bridge.

Abstract: A method for fabricating a microelectromechanical or microoptoelectromechanical component. The method includes producing first and second layer composites. The first has a first substrate and a first insulation layer, which covers at least one part of the surface of the first substrate, while the second has a second substrate and a second insulation layer, which covers at least one part of the surface of the second substrate. An at least partly conductive structure layer is applied to the first insulation layers and the second composite is applied to the structure layer so that the second insulation layer adjoins the structure layer. The first and second layer composites and the structure layer are configured so that at least one part of the structure layer that comprises the active area of the microelectromechanical or microoptoelectromechanical component is hermetically tightly sealed by the first and second layer composites.

Abstract: A method for quadrature-bias compensation in a Coriolis gyro whose resonator is in the form of a coupled system comprising a first and a second linear oscillator. The quadrature bias of the Coriolis gyro is determined. An electrostatic field is produced by variation of the mutual alignment of the two oscillators with respect to one another. The alignment/strength of the electrostatic field is regulated so that the determined quadrature bias is made as small as possible.

Abstract: In a method for quadrature-bias compensation in a Coriolis gyro, whose resonator (1) is in the form of a coupled system comprising a first and a second linear oscillator (3, 4), the quadrature bias of the Coriolis gyro is determined. An electrostatic field is produced by variation of the mutual alignment of the two oscillators (3, 4) with respect to one another, with the alignment/strength of the electrostatic field being regulated such that the determined quadrature bias is as small as possible.

Abstract: An analogue output signal of a sensor which comprises a carrier signal with a carrier frequency ?C which is modulated by a measurement size is sampled with a sampling frequency ?A to receive a sampled sensor output signal. The frequency ?A of the sampling signal is set so that it is an integer divisor n of the carrier frequency ?C, wherein the phase of the sampling signal is set so that the sampling signal is synchronous to the sensor output signal. The sampled sensor output signal is filtered now to remove periodically repeated signal components from the sampled sensor output signal. Then a filtered useful signal is received, wherein its amplitude is proportional to the measurand detected by the sensor.

Abstract: An analogue output signal of a sensor which comprises a carrier signal with a carrier frequency &ohgr;C which is modulated by a measurement size is sampled with a sampling frequency &ohgr;A to receive a sampled sensor output signal. The frequency &ohgr;A of the sampling signal is set so that it is an integer divisor n of the carrier frequency &ohgr;C, wherein the phase of the sampling signal is set so that the sampling signal is synchronous to the sensor output signal. The sampled sensor output signal is filtered now to remove periodically repeated signal components from the sampled sensor output signal. Then a filtered useful signal is received, wherein its amplitude is proportional to the measurand detected by the sensor.

Abstract: A rotational rate gyroscope for detecting rotation thereof comprises a base member, a primary oscillator supported by its primary oscillator suspension so as to be movable with respect to the base member, and a secondary oscillator supported by a secondary oscillator suspension, separate from primary oscillator suspension, so as to be movable with respect to the primary oscillator. The secondary oscillator suspension is designed such that movement that can be applied to the primary oscillator can be transferred to the secondary oscillator, whereas the movement of the secondary oscillator effected by the Coriolis force substantially is not transferred back to the primary oscillator. In addition thereto, the major surfaces of the primary oscillator and of the secondary oscillator extend substantially in the same plane, with the movement of the primary oscillator and/or of the secondary oscillator also taking place in this plane.

Abstract: An acceleration threshold sensor includes a supporting device, a seismic mass, and a connecting device with the aid of which the seismic mass is attached to the supporting device. The connecting device is provided with a predetermined breaking point interrupting the connection between the seismic mass and the supporting device when said seismic mass is subjected to an acceleration exceeding a predetermined acceleration. This sensor has a simple structural design, can be produced at a reasonable price and is always ready to carry out a measurement. Additionally, this sensor is able to store, without any auxiliary power, that it has been subjected to an acceleration exceeding a predetermined acceleration.

Abstract: A rotational rate gyroscope for detecting rotation thereof comprises a base member, a primary oscillator supported by its primary oscillator suspension so as to be movable with respect to the base member, and a secondary oscillator supported by a secondary oscillator suspension, separate from primary oscillator suspension, so as to be movable with respect to the primary oscillator. The secondary oscillator suspension is designed such that movement that can be applied to the primary oscillator can be transferred to the secondary oscillator, whereas the movement of the secondary oscillator effected by the Coriolis force substantially is not transferred back to the primary oscillator. In addition thereto, the major surfaces of the primary oscillator and of the secondary oscillator extend substantially in the same plane, with the movement of the primary oscillator and/or of the secondary oscillator also taking place in this plane.

Abstract: A rotational rate gyroscope (100) for detecting rotation thereof comprises a base member (102), a primary oscillator (106) supported by its primary oscillator suspension (104) so as to be movable with respect to the base member (102), and a secondary oscillator (114) supported by a secondary oscillator suspension (112), separate from primary oscillator suspension (104), so as to be movable with respect to the primary oscillator (106). The secondary oscillator suspension (112) is designed such that movement that can be applied to the primary oscillator (106) can be transferred to the secondary oscillator (114), whereas the movement of the secondary oscillator (114) effected by the Coriolis force substantially is not transferred back to the primary oscillator (106).