Abstract: The invention relates to a method for producing a polycrystalline ceramic film on a surface (12) of a substrate (10), in which a particle stream is directed onto the surface (12) and the ceramic film is formed by deposition of the particles onto the surface (12), wherein the particle stream is directed by means of a diaphragm onto the surface (12) along a preferred direction until a first specified layer thickness is reached, the preferred direction and a surface normal of the surface (12) enclosing a specified angle of incidence. According to the invention, the diaphragm is removed from the particle stream after the specified layer thickness has been reached, and additional particles are directed onto the surface (12) until a specified second layer thickness has been reached.

Abstract: A method for producing a micro system, said method comprising: providing a substrate (2) made of aluminum oxide; producing a thin film (6) on the substrate (2) by depositing lead zirconate titanate onto the substrate (2) with a thermal deposition method such that the lead zirconate titanate in the thin film (6) is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate (2) together with the thin film (6).

Abstract: The invention relates to a method for producing a polycrystalline ceramic film on a surface (12) of a substrate (10), in which a particle stream is directed onto the surface (12) and the ceramic film is formed by deposition of the particles onto the surface (12), wherein the particle stream is directed by means of a diaphragm onto the surface (12) along a preferred direction until a first specified layer thickness is reached, the preferred direction and a surface normal of the surface (12) enclosing a specified angle of incidence. According to the invention, the diaphragm is removed from the particle stream after the specified layer thickness has been reached, and additional particles are directed onto the surface (12) until a specified second layer thickness has been reached.

Abstract: A method for producing a micro system, said method comprising: providing a substrate (2) made of aluminum oxide; producing a thin film (6) on the substrate (2) by depositing lead zirconate titanate onto the substrate (2) with a thermal deposition method such that the lead zirconate titanate in the thin film (6) is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate (2) together with the thin film (6).

Abstract: A device for detecting at least one substance of a fluid includes at least one piezo-acoustic resonator with at least one piezo layer, an electrode arranged on the piezo-electric layer, at least one other electrode arranged on the piezo-electric layer and a surface section used for sorption of the substance of the fluid. The piezo-electric layer, the electrodes and the surface section are disposed in such a way that electric control of the electrodes leads to an oscillation of the resonator at a resonance frequency which depends upon the amount of the substance which is sorbed on the surface section. The thickness of the pioelectric layer is in the region of 0.5 to 20 ?m and the resonance frequency of the oscillation ranges from 500 MHz to 2 GHz. The device is a mass sensor with a piezo-acoustic high-frequency thin film resonator.

Abstract: Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation and/or sensor device and the opposite layer area of which forms a stimulation and/or sensor area for capacitive simulation and/or detection of biological tissues, wherein the dielectric layer comprises TiO2.

Abstract: A separable connection is created between at least one transfer support and the conductor structure. The transfer support including the conductor structure and the substrate are joined together such that a connection that is stronger than the separable connection between the transfer support and the conductor structure is created between the conductor structure and the substrate. The separable connection between the transfer support and the conductor structure of the transfer support is separated while the connection between the conductor structure and the substrate remains intact. The method is particularly suitable for laterally disposing conductor structures comprising nanotubes at relatively low temperatures (T<600° C.), resulting in a substrate with a conductor structure which is connected to the substrate on a contact surface of the substrate and at least one additional contact surface of the substrate.

Abstract: A device for detecting at least one substance of a fluid includes at least one piezo-acoustic resonator with at least one piezo layer, an electrode arranged on the piezo-electric layer, at least one other electrode arranged on the piezo-electric layer and a surface section used for sorption of the substance of the fluid. The piezo-electric layer, the electrodes and the surface section are disposed in such a way that electric control of the electrodes leads to an oscillation of the resonator at a resonance frequency which depends upon the amount of the substance which is sorbed on the surface section. The thickness of the pioelectric layer is in the region of 0.5 to 20 ?m and the resonance frequency of the oscillation ranges from 500 MHz to 2 GHz. The device is a mass sensor with a piezo-acoustic high-frequency thin film resonator.

Abstract: The invention relates to a glass ceramic mass containing at least one oxide ceramic containing barium, titanium and at least one rare earth metal Rek; and at least one glass material containing at least one oxide with boron, at least one oxide with silicon and at least one oxide with at least one bivalent metal Me2+. The glass ceramic mass is characterised in that the glass material contains at least one oxide with bismuth, especially bismuth trioxide. The oxide ceramic is especially a microwave ceramic of formula BaRek2Ti4O12, Rek being neodymium or samarium. The composition of the oxide ceramic remains essentially constant during the sintering of the glass ceramic, enabling the material properties of the glass ceramic mass, such as permittivity (20–80), quality (800–5000) and Tkf (±20 ppm/K) to be specifically predetermined. The glass ceramic mass is characterised by a densification temperature of under 910° C.

Abstract: Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation and/or sensor device and the opposite layer area of which forms a stimulation and/or sensor area for capacitive simulation and/or detection of biological tissues, wherein the dielectric layer comprises TiO2.

Abstract: A ceramic mass includes one ceramic material and at least a second different ceramic material. Glass material is arranged between the ceramic materials. The glass material reduces the sintering temperature of the ceramic mass and prevents the various ceramic materials from forming a mixed crystal when the ceramic mass is sintered. The ceramic mass is suitable for use in LTCC technology for the production of capacitors whose permittivity is dependent upon a specific temperature range.

Abstract: The invention relates to a glass ceramic mass, comprising at least one oxide ceramic, containing barium, titanium and at least one rare earth metal Rek and at least one glass material, containing at least one oxide with boron and at least one oxide of a rare earth metal Reg. The glass material further contains either an oxide of a tetravalent metal Me4+, or at least one oxide of a pentavalent metal Me5+. A compression of the glass ceramic mass occurs above all by viscous flow. A low vitrification temperature can thus be achieved. Crystallisation products are produced during and/or after the compression. The rare earth oxide and the crystallisation products can be used to pre-determine each of a dielectric material property of the glass ceramic mass in a wide range such as permittivity (15-80), Q (350-5000) and Tf value (±20 ppm/K). The glass ceramic mass is characterised by a vitrification temperature of below 850° C.

Abstract: The invention relates to a glass ceramic mass containing at least one oxide ceramic containing barium, titanium and at least one rare earth metal Rek; and at least one glass material containing at least one oxide with boron, at least one oxide with silicon and at least one oxide with at least one bivalent metal Me2+. The glass ceramic mass is characterised in that the glass material contains at least one oxide with bismuth, especially bismuth trioxide. The oxide ceramic is especially a microwave ceramic of formula BaRek2Ti4O12, Rek being neodymium or samarium. The composition of the oxide ceramic remains essentially constant during the sintering of the glass ceramic, enabling the material properties of the glass ceramic mass, such as permittivity (20-80), quality (800-5000) and Tkf (±20 ppm/K) to be specifically predetermined. The glass ceramic mass is characterised by a densification temperature of under 910 ° C.

Abstract: The invention relates to a ceramic mass (1) consisting of one ceramic material (2) and at least one other kind of ceramic material (3) different therefrom. Glass material (4) is arranged between the ceramic materials. The glass material reduces the sintering temperature of the ceramic mass and prevents the various ceramic materials from forming a mixed crystal when the ceramic mass is sintered. The ceramic mass is suitable for use in LTCC technology for the production of capacitors whose permittivity is dependent upon a specific temperature range.

Abstract: The invention is directed to an extremely low-capacitance device for shaping an electron beam. The device is based on a ceramic body having a monolithic multi-layer structure. The manufacture of the ceramic body ensues with the assistance of LTCC technology, whereby this method is designationally modified. The body is constructed of pre-sintered ceramic layers whose lateral shrinkage is suppressed. The through apertures of the electrodes for the electron beam are thus arranged exactly coaxially, and the tolerances of the electrode dimensions are decoupled from the shrinkage during sintering. The electron beam of an electron gun is focused and the intensity thereof is modulated with the assistance of such a device.

Abstract: A memory cell configuration and a method for its production include stacked capacitors and use a vertical storage capacitor having a ferroelectric or paraelectric storage dielectric. In order to produce the storage capacitor, a dielectric layer for the storage dielectric is produced over the whole area. The dielectric layer is subsequently structured and first electrodes and second electrodes for the storage capacitors are formed. The invention is suitable for Gbit DRAMs and for nonvolatile memories.

Abstract: A thin-film technology multi-layer capacitor with enhanced capacitance and/or reduced space requirement. The dielectric layers of which are alternately disposed between electrode layers on a substrate. Through alternate electrode layer connections, parallel interconnection of the individual capacitor layers is obtained. The result is that the individual capacitances are additive, while the temperature response can be optimized by a suitable choice or combination of different dielectric layers.

Abstract: A semiconductor detector for infrared radiation is manufactured by the steps of depositing an auxiliary layer on a main surface of a carrier, depositing a membrane layer provided with at least one opening onto the auxiliary layer, selectively etching the auxiliary layer through the at least one opening of the membrane layer, so that a hollow space arises in the auxiliary layer, sealing the hollow space by depositing a covering on th membrane layer, and fashioning a detector element on the covering by depositing a material sensitive to infrared radiation within a region of the covering that is bounded by the hollow space therebelow.

Abstract: A novel pyrodetector element is produced by oriented growth, with the aid of buffer layers, above a monocrystalline silicon substrate and thus enables the fabrication of an array of pyrodetectors having read-out and amplifier circuitry integrated on the common substrate. Proposed as the buffer layers are yttrium-stabilized zirconium oxide YSZ or magnesium oxide above an interlayer made of spinel.

Abstract: To improve stability and efficiency of a high-temperature solid-electrolyte fuel cell of planar multilayer design, it is proposed to increase the effective interface between the electrolyte layer and an electrode layer. This is achieved by a suitably treated surface of the electrolyte layer or by a porous and/or rough interlayer.