Patents by Inventor Won Bum Seo

Won Bum Seo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate treating apparatus and method
    Patent number: 9214357
    Abstract: The present invention disclosed herein relates to a substrate treating apparatus and method. The substrate treating method includes: providing a substrate on which an oxide layer is formed; treating the oxide layer with a first process gas in a plasma state to substitute the treated oxide layer with a by-product layer; and heating the substrate to remove the by-product layer at a temperature which is above a first heating temperature at which the by-product layer is decomposed and is above a second heating temperature that is a boiling point of an additive by-product generated while the by-product layer is decomposed.
    Type: Grant
    Filed: August 21, 2014
    Date of Patent: December 15, 2015
    Assignee: PSK INC.
    Inventors: Young Yeon Ji, Won Bum Seo, Byoung Hoon Kim