Patents by Inventor Won-Kyung Ryu

Won-Kyung Ryu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for analyzing contaminants on wafer
    Patent number: 7880138
    Abstract: Provided is an apparatus and method for analyzing contaminants on a wafer. The apparatus includes: a wafer holder for supporting a wafer on which contaminants to be analyzed are located, a laser ablation device for irradiating a laser to the wafer to extract a discrete specimen from the wafer, an analysis cell for collecting a discrete specimen from the surface of the wafer by irradiating the laser, and an analysis device connected to the analysis cell for analyzing contaminants from the collected discrete specimen.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: February 1, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jae-Seok Lee, Heung-Bin Lim, Won-Kyung Ryu, Seung-Ki Chae, Yang-Koo Lee, Hun-Jung Yi
  • APPARATUS AND METHOD FOR ANALYZING CONTAMINANTS ON WAFER
    Publication number: 20080149827
    Abstract: Provided is an apparatus and method for analyzing contaminants on a wafer. The apparatus includes: a wafer holder for supporting a wafer on which contaminants to be analyzed are located, a laser ablation device for irradiating a laser to the wafer to extract a discrete specimen from the wafer, an analysis cell for collecting a discrete specimen from the surface of the wafer by irradiating the laser, and an analysis device connected to the analysis cell for analyzing contaminants from the collected discrete specimen.
    Type: Application
    Filed: December 21, 2007
    Publication date: June 26, 2008
    Applicants: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jae-Seok LEE, Heung-Bin LIM, Won-Kyung RYU, Seung-Ki CHAE, Yang-Koo LEE, Hun-Jung YI