Abstract: A method for automatically controlling a semiconductor manufacturing process in a semiconductor factory, includes the steps of: a) receiving a lot specification data and a lot process data; b) comparing the lot specification data with the lot process data to determine whether a difference between the lot specification data and the lot process data is within a predetermined range; c) if a difference between the lot specification data and the lot process data exceeds or falls below a predetermined range, generating a first message representing an occurrence of an abnormally manufactured lot; d) generating a first transaction in response to the first message, the first transaction representing that the lot is abnormally manufactured; and e) storing the first transaction into a storage unit, so that a next lot process to the abnormally manufactured lot is prevented.

Abstract: A method for automatically controlling a semiconductor manufacturing process in a semiconductor factory, includes the steps of: a) receiving a lot specification data and a lot process data; b) comparing the lot specification data with the lot process data to determine whether a difference between the lot specification data and the lot process data is within a predetermined range; c) if a difference between the lot specification data and the lot process data exceeds or falls below a predetermined range, generating a first message representing an occurrence of an abnormally manufactured lot; d) generating a first transaction in response to the first message, the first transaction representing that the lot is abnormally manufactured; and e) storing the first transaction into a storage unit, so that a next lot process to the abnormally manufactured lot is prevented.

Abstract: A method for transporting semiconductor wafers in semiconductor factory automation system, includes the steps of: a) processing a lot of semiconductor wafers to be contained in a semiconductor wafer cassette in a process equipment; b) sending a cassette transportation request from the process equipment to a cell management server when the process equipment has processed the lot of semiconductor wafers; c) generating a transportation instruction in response to the cassette transportation request; and d) if the semiconductor wafer cassette is transported from the process equipment to a stocker by an automatic guide vehicle (AGV), simultaneously activating the AGV and the stocker by simultaneously sending the transportation instruction to the AGV and the stocker. The method in accordance with the present invention can reduce a time taken to transport the semiconductor wafers.