Abstract: The present inventive concept relates to a substrate processing apparatus including a supporting part for supporting a substrate; a disk supporting a plurality of the supporting parts; a lid disposed on the disk; and a first protrusion portion coupled to the disk to protrude in an upward direction from the disk to the lid in a center region disposed inward from the supporting parts and a gap region disposed between the supporting parts.

Abstract: A substrate processing apparatus includes a process chamber including a reaction space in which at least one substrate is mounted, a transfer chamber for transferring the at least one substrate to the process chamber, and a buffer chamber including a rotating device for rotating the at least one substrate by a predetermined angle, wherein the rotating device includes a rotating plate, a rotating shaft for rotating the rotating plate by the predetermined angle, a drive unit for driving the rotating shaft, a controller for controlling the drive unit, and a plurality of substrate support members, which are disposed on the rotating plate and on which the at least one substrate is mounted.

Abstract: A simulation device configured to perform a simulation based on a digital twin service includes a creation unit configured to create a simulation model based on model design data; an identification unit configured to identify at least one intrinsic parameter of the created simulation model and at least one input value related to the intrinsic parameter; an output unit configured to output an estimated output value which is produced from the simulation model depending on the input value based on the intrinsic parameter; a correlation analysis unit configured to analyze a correlation between the intrinsic parameter and the estimated output value; a selection unit configured to select at least one representative intrinsic parameter from among the at least one intrinsic parameter depending on the analyzed correlation; a collection unit configured to collect real sensor data related to the representative intrinsic parameter from a real model constructed based on the model design data; an update unit configured to

Abstract: Provided is a cloud platform system for reading a medical image, the cloud platform system including: multiple image processing modules pre-programmed to perform preprocessing of the medical image and modularized; multiple artificial intelligence modules in which an artificial intelligence algorithm is pre-programmed and modularized; multiple layer modules in which layers applied to a configuration of the artificial intelligence algorithm are modularized by function; a learning model design unit providing a graphical user interface for designing an artificial intelligence-based learning model to a user terminal that has had access through a web browser; and a reading model generation unit generating a reading model by training the learning model designed by the learning model design unit.

Abstract: One embodiment of a substrate supporting apparatus comprises: a support member for supporting a substrate; and a temperature compensating member disposed at the edge of the support member, and compensating the temperature of the substrate, wherein the support member may be made of a light-transmissive material, the temperature compensating member may be made of an opaque material, and the surface of the temperature compensating member may be made of a material having corrosion resistance against a cleaning gas.

Abstract: A substrate processing apparatus includes a process chamber including a reaction space in which at least one substrate is mounted, a transfer chamber for transferring the at least one substrate to the process chamber, and a buffer chamber including a rotating device for rotating the at least one substrate by a predetermined angle, wherein the rotating device includes a rotating plate, a rotating shaft for rotating the rotating plate by the predetermined angle, a drive unit for driving the rotating shaft, a controller for controlling the drive unit, and a plurality of substrate support members, which are disposed on the rotating plate and on which the at least one substrate is mounted.

Abstract: The present inventive concept relates to a substrate processing apparatus including a supporting part for supporting a substrate; a disk supporting a plurality of the supporting parts; a lid disposed on the disk; and a first protrusion portion coupled to the disk to protrude in an upward direction from the disk to the lid in a center region disposed inward from the supporting parts and a gap region disposed between the supporting parts.

Abstract: One embodiment of a substrate supporting apparatus comprises: a support member for supporting a substrate; and a temperature compensating member disposed at the edge of the support member, and compensating the temperature of the substrate, wherein the support member may be made of a light-transmissive material, the temperature compensating member may be made of an opaque material, and the surface of the temperature compensating member may be made of a material having corrosion resistance against a cleaning gas.