Abstract: Example embodiments relate to a method of manufacturing graphene structures having nanobubbles. The graphene structure includes a graphene layer on a substrate, the graphene layer having a plurality of convex portions and a band gap that is due to the plurality of convex portions. The method includes preparing the graphene layer on the substrate, and forming the plurality of convex portions on the graphene layer by irradiating a noble gas onto the graphene layer.

Abstract: Example embodiments relate to graphene structures having nanobubbles, and/or to a method of manufacturing the graphene structure. The graphene structure includes a substrate and a graphene layer on the substrate, the graphene layer having a plurality of convex portions. One or more of the plurality of convex portions has a hollow structure, and the graphene layer has a band gap that is due to the plurality of convex portions. A noble gas is included between the substrate and the convex portions.

Abstract: A conductor including a graphene layer and a method of manufacturing the conductor are provided. The conductor may further include a nano pattern disposed on a substrate, and the graphene layer may be formed on the nano pattern. The nano pattern may have any various shapes and include a material that interacts with the graphene layer. The nano pattern and the graphene layer included in the conductor may interact with each other, such that the electric characteristics of the conductor are maintained while the heat transfer characteristics thereof are improved.

Abstract: A transporting apparatus configured to transport an object to a storage container includes: a transporting rod having one end configured to connect to the object, the transporting rod extending in a transporting direction of the object; a transporting portion that moves the transporting rod in the transporting direction of the object; and a contact sensor portion provided on an outer wall of the transporting rod and configured to sense contact between the transporting rod and the storage container.

Abstract: Methods of intercalating an insulating layer between a metal catalyst layer and a graphene layer and methods of fabricating a semiconductor device using the intercalating method are provided. The method of intercalating the insulating layer includes forming the graphene layer on the metal catalyst substrate, intercalating nitrogen ions between the metal catalyst substrate and the graphene layer, and forming the insulating layer between the metal catalyst substrate and the graphene layer by heating the metal catalyst substrate to chemically combine the nitrogen ions with the metal catalyst substrate.

Abstract: A conductor including a graphene layer and a method of manufacturing the conductor are provided. The conductor may further include a nano pattern disposed on a substrate, and the graphene layer may be formed on the nano pattern. The nano pattern may have any various shapes and include a material that interacts with the graphene layer. The nano pattern and the graphene layer included in the conductor may interact with each other, such that the electric characteristics of the conductor are maintained while the heat transfer characteristics thereof are improved.

Abstract: Example embodiments relate to graphene structures having nanobubbles, and/or to a method of manufacturing the graphene structure. The graphene structure includes a substrate and a graphene layer on the substrate, the graphene layer having a plurality of convex portions. One or more of the plurality of convex portions has a hollow structure, and the graphene layer has a band gap that is due to the plurality of convex portions. A noble gas is included between the substrate and the convex portions.

Abstract: A transporting apparatus configured to transport an object to a storage container includes: a transporting rod having one end configured to connect to the object, the transporting rod extending in a transporting direction of the object; a transporting portion that moves the transporting rod in the transporting direction of the object; and a contact sensor portion provided on an outer wall of the transporting rod and configured to sense contact between the transporting rod and the storage container.