Abstract: The present invention provides a method for manufacturing a semiconductor nanowire device in mass production at a low cost without an additional complex nanowire alignment process or SOI substrate by forming a single crystal silicon nanowire with a simple process without forming an ultra fine pattern using an electron beam and transferring the nanowire separated from the substrate to another oxidation layer or insulation substrate. And also, the present invention suggests a method for simply manufacturing a nanowire device transferring the nanowire from a semiconductor substrate formed thereon the nanowire to another substrate formed thereon an insulation layer or the like.

Abstract: The present invention provides a method for manufacturing a semiconductor nanowire device in mass production at a low cost without an additional complex nanowire alignment process or SOI substrate by forming a single crystal silicon nanowire with a simple process without forming an ultra fine pattern using an electron beam and transferring the nanowire separated from the substrate to another oxidation layer or insulation substrate. And also, the present invention suggests a method for simply manufacturing a nanowire device transferring the nanowire from a semiconductor substrate formed thereon the nanowire to another substrate formed thereon an insulation layer or the like.

Abstract: An optical switch enabling optical communications between an input port and an output port of an optical waveguide by minimizing loss error of an optical signal without using a collimator comprised of a separate mediate optical waveguide, lens or the like is provided. The multi-channel optical switch, which changes optical paths, includes four pairs of input optical waveguides and output optical waveguide arranged in parallel to each other, the first pair of input optical waveguide and output optical waveguide facing the second pair of input optical waveguide and output optical waveguide at an angle of 90 degrees, the first input optical waveguide being installed to correspond to the second output optical waveguide, four mirrors installed to enter in optical path directions between the four pairs of input optical waveguides and output optical waveguides, thereby changing the optical paths, and a mirror actuator for selectively operating the entering of the mirror.