Patents by Inventor Won-Ju Jo

Won-Ju Jo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE BY USING THE SAME
    Publication number: 20110272279
    Abstract: In a process for manufacturing a hyperfine semiconductor device, an apparatus for manufacturing a semiconductor device such as a schottky barrier MOSFET and a method for manufacturing the semiconductor device using the same are provided. Two chambers are connected with each other. A cleaning process, a metal layer forming process, and subsequent processes can be performed in situ by using the two chambers, thereby the attachment of the unnecessary impurities and the formation of the oxide can be prevented and the optimization of the process can be accomplished.
    Type: Application
    Filed: July 15, 2011
    Publication date: November 10, 2011
    Applicant: Electronics and Telecommunications Research Institute
    Inventors: Woo-Seok CHEONG, Seong-Jae LEE, Won-Ju Jo, Moon-Gyu JANG
  • Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device by using the same
    Publication number: 20060048706
    Abstract: In a process for manufacturing a hyperfine semiconductor device, an apparatus for manufacturing a semiconductor device such as a schottky barrier MOSFET and a method for manufacturing the semiconductor device using the same are provided. Two chambers are connected with each other. A cleaning process, a metal layer forming process, and subsequent processes can be performed in situ by using the two chambers, thereby the attachment of the unnecessary impurities and the formation of the oxide can be prevented and the optimization of the process can be accomplished.
    Type: Application
    Filed: December 30, 2002
    Publication date: March 9, 2006
    Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH I INSTITUTE
    Inventors: Woo-Seok Cheong, Seong-Jae Lee, Won-Ju Jo, Moon-Gyu Jang