Patents by Inventor Woo-Cheol Noh

Woo-Cheol Noh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES
    Publication number: 20150255336
    Abstract: In a method of manufacturing a semiconductor device, an insulating interlayer is formed on a substrate. The insulating interlayer is partially removed to form an opening. A barrier conductive layer is formed on a sidewall and a bottom of the opening. An RF sputtering process and a DC sputtering process are performed independently on the barrier conductive layer to form a seed layer. A plated layer is formed on the seed layer.
    Type: Application
    Filed: March 2, 2015
    Publication date: September 10, 2015
    Inventors: Hyo-Jeong Moon, Woo-Cheol Noh, Woo-Jin Jang, Hun Kim, Hong-Jae Shin