Patents by Inventor Woo-Guan CHIONG

Woo-Guan CHIONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for positioning and calibrating a wafer transportation apparatus
    Patent number: 9658316
    Abstract: In accordance with some embodiments, a positioning calibration device arranged within a transfer buffer is provided. The positioning calibration device includes at least one target element and at least three positioning modules. The at least one target element is arranged on a wafer transportation apparatus within the transfer buffer. The transportation apparatus is utilized to transfer a wafer. The at least three positioning modules are utilized to detect the positions of the at least one target element by wireless communications for generating position information of the wafer transportation apparatus. The heights which each of the at least three positioning modules arranged at are not the same.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: May 23, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Wei Chang, Woo-Guan Chiong
  • DEVICE AND METHOD FOR POSITIONING AND CALIBRATING A WAFER TRANSPORTATION APPARATUS
    Publication number: 20150185310
    Abstract: In accordance with some embodiments, a positioning calibration device arranged within a transfer buffer is provided. The positioning calibration device includes at least one target element and at least three positioning modules. The at least one target element is arranged on a wafer transportation apparatus within the transfer buffer. The transportation apparatus is utilized to transfer a wafer. The at least three positioning modules are utilized to detect the positions of the at least one target element by wireless communications for generating position information of the wafer transportation apparatus. The heights which each of the at least three positioning modules arranged at are not the same.
    Type: Application
    Filed: December 30, 2013
    Publication date: July 2, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chi-Wei CHANG, Woo-Guan CHIONG