Patents by Inventor Woohyeok Jeong

Woohyeok Jeong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12259662
    Abstract: A method for manufacturing a semiconductor device may include: forming a first layer comprising a plurality of patterns, each pattern having a different respective pitch; performing exposure and development to form a second layer at a layer different from the first layer; determining whether a pitch shift of a part of exposure patterns formed is within a tolerance range, using a Moiré pattern; and performing etching for the second layer when the pitch shift of the part of exposure patterns is determined to be within the tolerance range. Performing the exposure and the development may include forming a first exposure pattern corresponding to a key pattern having a first pitch, forming a second exposure pattern corresponding to a cell pattern having a second pitch, and forming a third exposure pattern corresponding to a middle pitch pattern having a third pitch between the first pitch and the second pitch.
    Type: Grant
    Filed: November 8, 2022
    Date of Patent: March 25, 2025
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Woohyeok Jeong, Donghwan Kim, Inchul Shin, Wonhyeok Jo, Hyein Cho, Seulgi Han
  • Publication number: 20230152715
    Abstract: A method for manufacturing a semiconductor device may include: forming a first layer comprising a plurality of patterns, each pattern having a different respective pitch; performing exposure and development to form a second layer at a layer different from the first layer; determining whether a pitch shift of a part of exposure patterns formed is within a tolerance range, using a Moire pattern; and performing etching for the second layer when the pitch shift of the part of exposure patterns is determined to be within the tolerance range. Performing the exposure and the development may include forming a first exposure pattern corresponding to a key pattern having a first pitch, forming a second exposure pattern corresponding to a cell pattern having a second pitch, and forming a third exposure pattern corresponding to a middle pitch pattern having a third pitch between the first pitch and the second pitch.
    Type: Application
    Filed: November 8, 2022
    Publication date: May 18, 2023
    Inventors: Woohyeok Jeong, Donghwan Kim, Inchul Shin, Wonhyeok Jo, Hyein Cho, Seulgi Han
  • Patent number: D978140
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: February 14, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junyong Song, Byoungjin Kim, Woohyeok Jeong, Eunsoo Kim, Junghyun Choi
  • Patent number: D1018513
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: March 19, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1018515
    Type: Grant
    Filed: December 1, 2022
    Date of Patent: March 19, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1018551
    Type: Grant
    Filed: December 1, 2022
    Date of Patent: March 19, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1021882
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: April 9, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1021883
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: April 9, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1021884
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: April 9, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1024042
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: April 23, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1024043
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: April 23, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1024044
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: April 23, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1024045
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: April 23, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1033426
    Type: Grant
    Filed: January 12, 2023
    Date of Patent: July 2, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junyong Song, Byoungjin Kim, Woohyeok Jeong, Eunsoo Kim, Junghyun Choi
  • Patent number: D1042385
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: September 17, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1042386
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: September 17, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1042387
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: September 17, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1042388
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: September 17, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1042426
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: September 17, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong
  • Patent number: D1043601
    Type: Grant
    Filed: November 23, 2022
    Date of Patent: September 24, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junghyun Choi, Bosoon Kang, Byoungjin Kim, Taeho Kim, Junyong Song, Woohyeok Jeong