Abstract: An apparatus for removing a residual gas on a wafer comprises at least one spraying nozzle disposed at a front of a loading volume formed within a housing and extending linearly along a horizontal direction respectively; and a plurality of spraying holes formed at each spraying nozzle along the extending direction of each spraying nozzle, wherein the residual gas or a contaminating matter on a surface of the wafer is removed by a gas or a CDA (Clean Dry Air) sprayed through the plurality of the spraying holes.

Abstract: Provided is a method for determining a center position of a transferred semiconductor part including: disposing at least one pair of component detecting sensors at a transferring path of the semiconductor part; detecting different portions of the semiconductor part by each component detecting sensor; calculating a centering position of the semiconductor part based on the detected different portions; and fixing the semiconductor part at a designated position based on the calculating result.

Abstract: A battery module includes: a battery cell assembly having a plurality of battery cells stacked therein and a plurality of frames supporting the plurality of battery cells; a front sensing assembly measuring voltages of the plurality of battery cells and mounted on a front end of the battery cell assembly; a rear sensing assembly measuring voltages of the plurality of battery cells and mounted on a rear end of the battery cell assembly; a front cover covering at least a portion of the front sensing assembly; and a rear cover covering at least a portion of the rear sensing assembly.

Abstract: The present disclosure relates to an apparatus for controlling a side mirror of an autonomous vehicle and a method thereof. According to an embodiment of the present disclosure, it is possible to detect whether a vehicle is autonomously driven and to fold the side mirror such that a mirror surface is in close contact with a vehicle body surface or side window glass or to insert the side mirror into the inner space of the vehicle when the vehicle is autonomously driven. Through the present disclosure, it is possible to notify an external vehicle of information indicating that the vehicle is driven in an autonomous driving mode.

Abstract: An apparatus and a method are configured to control a steering wheel of an autonomous driving vehicle. A state of a driver may be monitored during autonomous driving, and at least one of an upward/downward location, a leftward/rightward tilting angle, or an axial movement of the steering wheel of the autonomous driving vehicle may be controlled based on the state of the driver. As a result, danger information may be delivered to the driver through a dual system during autonomous driving.

Abstract: A substrate transfer apparatus includes a moving plate, a load lock chamber disposed at one end of the moving plate, a plurality of processing chambers disposed in a longitudinal direction at opposite ends of the moving plate, and a first arm that is connected with the moving plate and that transfers a substrate between one processing chamber among the plurality of processing chambers and the load lock chamber. The moving plate provides a first path along which a first pivot axis of the first arm performs a circular motion on the moving plate.

Abstract: A substrate transfer apparatus includes a moving plate, a load lock chamber disposed at one end of the moving plate, a plurality of processing chambers disposed in a longitudinal direction at opposite ends of the moving plate, and an arm that is connected with the moving plate and that transfers a substrate between one processing chamber among the plurality of processing chambers and the load lock chamber. The moving plate provides a first path along which a first pivot axis of the arm linearly moves in a lateral direction on the moving plate.

Abstract: Provided is a system for etching with a plasma present invention relates to a system. A system for etching with plasma comprises a source power module 11 for applying a RF power to an upper electrode 15; a bias power module 12 for applying a RF power to a lower electrode; and a bias DC power module 13 for applying a bias DC power to a wafer 18.

Abstract: Provided is a particle trapping apparatus for preventing an error of a pressure measurement. A particle trapping apparatus for preventing an error of a pressure measurement includes a pressure-measuring means; a measuring pipe for connecting the pressure-measuring means to a processing chamber; and a trapping means for capturing particles in a gas flowing through the measuring pipe, wherein the trapping means is coupled to the measuring pipe or is a portion of the measuring pipe.

Abstract: Provided is a particle trapping apparatus for preventing an error of a pressure measurement. A particle trapping apparatus for preventing an error of a pressure measurement includes a pressure-measuring means; a measuring pipe for connecting the pressure-measuring means to a processing chamber; and a trapping means for capturing particles in a gas flowing through the measuring pipe, wherein the trapping means is coupled to the measuring pipe or is a portion of the measuring pipe.

Abstract: Provided is an electrostatic chuck with multiple heater zones. The electrostatic chuck with multiple heater zones comprises multiple micro heater zones; a switch module having each switching means connected to each micro heater zone; and a switch controlling module for controlling an operation of the switch module, wherein each micro heater zone can be heated individually by a corresponding heating element, and each partial area of a wafer secured on the electrostatic chuck is heated independently by each micro heater zone.

Abstract: Provided is an apparatus for monitoring an exchanging process of a semiconductor part and a method for the same. The apparatus comprises finger having a structure capable of loading the part and transferred by a robot for exchanging; and at least one image obtaining means coupled to the finger and obtaining an image of an exchanging position.

Abstract: Provided is an apparatus for monitoring an exchanging process of a semiconductor part and a method for the same. The apparatus comprises finger having a structure capable of loading the part and transferred by a robot for exchanging; and at least one image obtaining means coupled to the finger and obtaining an image of an exchanging position.

Abstract: Provided is a structure variable type of a plasma source coil and a method for controlling the same. The plasma source coil comprises a plurality of coil branches extending in a spiral shape based on a central part, wherein at least one coil branch has a structure in which the extending direction or a tilting level can be adjusted.

Abstract: Provided is a structure variable type of a plasma source coil and a method for controlling the same. The plasma source coil comprises a plurality of coil branches extending in a spiral shape based on a central part, wherein at least one coil branch has a structure in which the extending direction or a tilting level can be adjusted.

Abstract: Provided is an apparatus for exchanging an article of a semi-conductor process and a method for exchanging the article using the same. The apparatus for exchanging an article in a semiconductor process, comprising: a loading unit located at a finger coupled to a transferring means for loading the article'an operation controlling unit displaced at the loading unit and having a communicating means; and at least one vision unit.

Abstract: A device and a method of subdividing data service charge in mobile communication network is disclosed. In one embodiment, the method includes receiving a billing initiation request signal from a wireless data service device (either an interworking function (IWF) unit or a packet data serving node (PDSN)), producing a usage-amount data for the subscriber based on at least one of the type and amount of data being transmitted through the wireless data service device on the mobile communication network. The method also includes, responsive to a billing end request signal, received from the wireless data service device, transferring a billing request signal, requesting to bill the subscriber for the usage-amount data, to an authentication, authorization and accounting (AAA) unit. In one embodiment, the above method can apply to a graduated billing for the each service group in the mobile communication network.

Abstract: A device and a method of subdividing data service charge in mobile communication network is disclosed. In one embodiment, the method includes receiving a billing initiation request signal from a wireless data service device (either an interworking function (IWF) unit or a packet data serving node (PDSN)), producing a usage-amount data for the subscriber based on at least one of the type and amount of data being transmitted through the wireless data service device on the mobile communication network. The method also includes, responsive to a billing end request signal, received from the wireless data service device, transferring a billing request signal, requesting to bill the subscriber for the usage-amount data, to an authentication, authorization and accounting (AAA) unit. In one embodiment, the above method can apply to a graduated billing for the each service group in the mobile communication network.