Abstract: An apparatus for manufacturing a semiconductor device includes a substrate transfer unit configured to transfer a substrate, a rail unit including a driving rail extending in a first direction that the substrate transfer unit moves and a stopper on a side of the driving rail in a second direction crossing the first direction, and a lifting unit configured to move in the first direction and a third direction perpendicular to the first and second directions to remove the substrate transfer unit from the rail unit, wherein the lifting unit is configured to contact the stopper to move the stopper from a closed state to an open state.

Abstract: Disclosed is a robot cleaner which adjusts a suction area of air suctioned into a suction port through a shutter and a shutter driving device configured to operate the shutter, so that a flow rate of air is adjusted, thus more effectively suctioning dust in the air by using a fan motor having a fixed capacity.

Abstract: A robot cleaner motor assembly including: a fan motor and a fan motor casing including an exhaust passage for guiding, to an exhaust port, air discharged from the fan motor, wherein the exhaust passage includes: a first exhaust passage guiding the air such that the air, discharged from a discharge port of the fan motor, moves to an upper or lower side of the fan motor; a second exhaust passage guiding, to a front end of the fan motor, the air discharged from the first exhaust passage; a third exhaust passage guiding the air such that the air, discharged from the second exhaust passage, moves to the lower or upper side of the fan motor along left and right sides of the fan motor; and a fourth exhaust passage guiding, to an exhaust port, the air having moved along the left and right sides of the third exhaust passage.

Abstract: Disclosed herein is a cleaning robot capable of allowing a driving apparatus to move along a cleaning apparatus when the cleaning apparatus is separated from the driving apparatus, and a controlling method thereof. In addition, a cleaning robot having a driving apparatus capable of storing a position from which a cleaning apparatus is separated when the cleaning apparatus is separated from the driving apparatus, and capable of moving to the stored position when the cleaning apparatus is mounted to the driving apparatus, and a controlling method thereof. The cleaning robot includes a driving apparatus provided with a mounting groove configured to allow a cleaning apparatus to be removably mounted, and the cleaning apparatus removably mounted to the mounting groove.

Abstract: Disclosed herein is a cleaning robot capable of allowing a driving apparatus to move along a cleaning apparatus when the cleaning apparatus is separated from the driving apparatus, and a controlling method thereof. In addition, a cleaning robot having a driving apparatus capable of storing a position from which a cleaning apparatus is separated when the cleaning apparatus is separated from the driving apparatus, and capable of moving to the stored position when the cleaning apparatus is mounted to the driving apparatus, and a controlling method thereof. The cleaning robot includes a driving apparatus provided with a mounting groove configured to allow a cleaning apparatus to be removably mounted, and the cleaning apparatus removably mounted to the mounting groove.

Abstract: The present disclosure includes a main body, a cleaning tool assembly connected to the main body to be movable in at least one axial direction, a handle part connected to the main body and configured to receive an applied force of a user, a detection part provided in the handle part and configured to detect a magnitude and a direction of the force applied to the handle part, and a control part configured to control the movement direction of the cleaning tool assembly based on the detected direction of the force and to control the movement distance of the cleaning tool assembly based on the detected magnitude of the force. In this way, the steering performance may be improved by reducing a horizontal load felt by a user when the user holds and moves the handle of the cleaner, fatigue felt when performing the cleaning operation may be removed by removing a vertical load applied by the handle, and convenience may be improved.

Abstract: Disclosed herein is a cleaning robot including a body; a display unit configured to display information related to various operations of the cleaning robot; a dust collecting box separably coupled with the body to collect dust introduced through a dust suction port; an air cleaning box to replace the dust collecting box and installed at the body to purify air introduced into the body and then discharge the purified air; and a control unit configured to recognize whether a box installed at the body is the dust collecting box or the air cleaning box, and to control the cleaning robot to perform a cleaning mode or an air cleaning mode according to a recognized result.

Abstract: Disclosed is a robot cleaner which adjusts a suction area of air suctioned into a suction port through a shutter and a shutter driving device configured to operate the shutter, so that a flow rate of air is adjusted, thus more effectively suctioning dust in the air by using a fan motor having a fixed capacity.

Abstract: A robot cleaner motor assembly including: a fan motor and a fan motor casing including an exhaust passage for guiding, to an exhaust port, air discharged from the fan motor, wherein the exhaust passage includes: a first exhaust passage guiding the air such that the air, discharged from a discharge port of the fan motor, moves to an upper or lower side of the fan motor; a second exhaust passage guiding, to a front end of the fan motor, the air discharged from the first exhaust passage; a third exhaust passage guiding the air such that the air, discharged from the second exhaust passage, moves to the lower or upper side of the fan motor along left and right sides of the fan motor; and a fourth exhaust passage guiding, to an exhaust port, the air having moved along the left and right sides of the third exhaust passage.

Abstract: The present disclosure includes a main body, a cleaning tool assembly connected to the main body to be movable in at least one axial direction, a handle part connected to the main body and configured to receive an applied force of a user, a detection part provided in the handle part and configured to detect a magnitude and a direction of the force applied to the handle part, and a control part configured to control the movement direction of the cleaning tool assembly based on the detected direction of the force and to control the movement distance of the cleaning tool assembly based on the detected magnitude of the force. In this way, the steering performance may be improved by reducing a horizontal load felt by a user when the user holds and moves the handle of the cleaner, fatigue felt when performing the cleaning operation may be removed by removing a vertical load applied by the handle, and convenience may be improved.

Abstract: Disclosed herein is a cleaning robot including a body; a display unit configured to display information related to various operations of the cleaning robot; a dust collecting box separably coupled with the body to collect dust introduced through a dust suction port; an air cleaning box to replace the dust collecting box and installed at the body to purify air introduced into the body and then discharge the purified air; and a control unit configured to recognize whether a box installed at the body is the dust collecting box or the air cleaning box, and to control the cleaning robot to perform a cleaning mode or an air cleaning mode according to a recognized result.