Abstract: A method of fabricating a semiconductor device is provided. The method includes: loading a substrate into a substrate processing apparatus; and processing the substrate, using the substrate processing apparatus. The processing the substrate includes: providing a process gas; generating a process etchant from the process gas, using plasma ignition, the process etchant including a first etchant and a second etchant; processing the substrate, using the process etchant; identifying a composition rate of the process etchant; and controlling the processing of the substrate based on a process result according to the composition rate of the process etchant.

Abstract: A substrate processing apparatus, a substrate processing method, and a method of fabricating a semiconductor device are provided. The substrate processing method includes providing a process gas, generating a preliminary etchant, which includes a first etchant and a second etchant, from the process gas through plasma ignition, generating a process etchant by controlling a composition ratio of the preliminary etchant, and performing a selective etching of the substrate with the process etchant.

Abstract: Disclosed are an active matrix-based electronic apparatus and a method of driving the same. More particularly, a pixel circuit of an electronic apparatus according to an embodiment of the present disclosure may include a light-emitting driver configured to apply a forward bias to a light-emitting device in an emission mode to control light to be emitted through the light-emitting device; a sensing driver configured to apply a non-forward bias to the light-emitting device in a sensing mode to control an electrical signal corresponding to light incident on the light-emitting device to be generated; and a reader configured to read intensity of light corresponding to the generated electrical signal.

Abstract: Disclosed are an active matrix-based electronic apparatus and a method of driving the same. More particularly, a pixel circuit of an electronic apparatus according to an embodiment of the present disclosure may include a light-emitting driver configured to apply a forward bias to a light-emitting device in an emission mode to control light to be emitted through the light-emitting device; a sensing driver configured to apply a non-forward bias to the light-emitting device in a sensing mode to control an electrical signal corresponding to light incident on the light-emitting device to be generated; and a reader configured to read intensity of light corresponding to the generated electrical signal.

Abstract: The present invention relates to an apparatus for treating waste containing mercury and a method for recovering high purity elemental mercury using the apparatus. More specifically, the present invention may provide a method that can more economically and stably recover high purity elemental mercury from waste containing mercury using an apparatus for recovering mercury from waste containing mercury, the apparatus comprising: a thermal desorption unit; a dust control unit; and a condensation and recovery unit, which are connected in series. The present invention has an advantage in that, compared to a conventional simple heat treatment-condensation method, a high recovery rate of mercury is achieved and high purity mercury can be obtained.

Abstract: The present invention relates to an apparatus for treating waste containing mercury and a method for recovering high purity elemental mercury using the apparatus. More specifically, the present invention may provide a method that can more economically and stably recover high purity elemental mercury from waste containing mercury using an apparatus for recovering mercury from waste containing mercury, the apparatus comprising: a thermal desorption unit; a dust control unit; and a condensation and recovery unit, which are connected in series. The present invention has an advantage in that, compared to a conventional simple heat treatment-condensation method, a high recovery rate of mercury is achieved and high purity mercury can be obtained.