Abstract: A method for manufacturing a semiconductor device includes providing a first pre-reticle including a first overlay mark and a first on-cell pattern. A second pre-reticle is provided that includes a second overlay mark and a second on-cell pattern. A first pattern is formed from the first pre-reticle using a first illumination system. A second pattern is formed from the second pre-reticle using a second illumination system. An overlay error is measured between the first pattern and the second pattern. A corrected reticle is formed based on the measured overlay error.

Abstract: A method of detecting coordinates of a mark is provided. The method includes: providing a plurality of structures and the mark on a wafer, each of the plurality of structures including a plurality of mold insulating layers and a plurality of mold sacrificial layers, which are alternately stacked, an end of each of the plurality of structures including a portion having a stair shape, and the mark being between adjacent structures among the plurality of structures; forming a photoresist layer on the plurality of structures and the mark, the photoresist layer including a portion concave toward the wafer between the adjacent structures; detecting the coordinates of the mark by irradiating a beam to the mark; determining an offset of the coordinates of the mark based on a beam path changing factor; and correcting the coordinates of the mark based on the offset.

Abstract: A reflective mask used in an EUV exposure process includes a mask substrate, a reflective layer on the mask substrate, and an absorption layer on the reflective layer. The reflective mask includes a main region, an out-of-band region surrounding the main region, and an alignment mark region outside a periphery of the out-of-band region. The absorption layer in the alignment mark region includes an alignment mark and an anti-reflection pattern adjacent the alignment mark, and the anti-reflection pattern includes line-and-space patterns having a predetermined line width in the alignment mark region.

Abstract: This disclosure relates to a printing device for printing or dispensing a curable printing composition which is capable of changing color in response to the application of a magnetic field in the non-cured state. The printing device may be a handheld device such as a portable pen. The present disclosure further relates to curable compositions, cartridges and methods which may be used in combination with the aforementioned printing devices or in other applications.

Abstract: An overlay correction method may include obtaining a first central line of a lower pattern on a substrate, forming a photoresist pattern on the lower pattern, obtaining an ADI overlay value corresponding to a first distance between a second central line of an upper flat surface of the lower pattern and a third central line of the photoresist pattern, obtaining an asymmetrical overlay value corresponding to a second distance between the first and second central lines, form an upper pattern using the photoresist pattern, obtaining an ACI overlay value corresponding to a third distance between the first central line and a fourth central line of the upper pattern, subtracting the ADI overlay value from the ACI overlay value to obtain a first overlay skew value, and adding the asymmetrical overlay value to the first overlay skew value to obtain a second overlay skew value.

Abstract: An earthwork target model generation system comprises a processor. The processor of the earthwork target model generation system stores a three-dimensional topography shape model and drill boring data in the target model generation system, generates a three-dimensional ground model using the three-dimensional topography shape model and the drill boring data, generates three-dimensional normal surface information in consideration of a design condition for each rock quality using the three-dimensional ground model, and sets the design condition.

Abstract: A control system for construction machinery, includes a hydraulic pump, first and second actuators connected to the hydraulic pump through first and second parallel lines respectively, first and second control valves installed in the first and second parallel lines respectively and configured to control operations of the first and second actuators, first and second spool displacement adjusting valves configured to control displacement amounts of the spools of the first and second control valves, and a control valve control portion configured to output the control signal, and configured to limit a maximum allowable value of the manipulation signal for the first actuator to a value selected by the operator and limit a spool displacement amount of the second control valve according to the limited manipulation signal for the first actuator when the manipulation signal for a multiple operation of the first and second actuators is received.

Abstract: A control system for construction machinery, includes a hydraulic pump, at least one control valve installed in a center bypass line connected to the hydraulic pump and configured to control a flow direction of a working oil discharged from the hydraulic pump to selectively supply the working oil to an actuator, a bypass control valve installed downstream from the control valve in the center bypass line to variably control an amount of the working oil draining to a drain tank through the center bypass line, and a controller configured to control operations of the hydraulic pump and the bypass control valve according to a manipulation signal of an operator and to open the bypass control valve according to pump peak occurrence to reduce a pump peak.

Abstract: This disclosure relates to a printing device for printing or dispensing a curable printing composition which is capable of changing color in response to the application of a magnetic field in the non-cured state. The printing device may be a handheld device such as a portable pen. The present disclosure further relates to curable compositions, cartridges and methods which may be used in combination with the aforementioned printing devices or in other applications.

Abstract: An overlay correction method may include obtaining a first central line of a lower pattern on a substrate, forming a photoresist pattern on the lower pattern, obtaining an ADI overlay value corresponding to a first distance between a second central line of an upper flat surface of the lower pattern and a third central line of the photoresist pattern, obtaining an asymmetrical overlay value corresponding to a second distance between the first and second central lines, form an upper pattern using the photoresist pattern, obtaining an ACI overlay value corresponding to a third distance between the first central line and a fourth central line of the upper pattern, subtracting the ADI overlay value from the ACI overlay value to obtain a first overlay skew value, and adding the asymmetrical overlay value to the first overlay skew value to obtain a second overlay skew value.

Abstract: A control system for construction machinery, includes a hydraulic pump, first and second actuators connected to the hydraulic pump through first and second parallel lines respectively, first and second control valves installed in the first and second parallel lines respectively and configured to control operations of the first and second actuators, first and second spool displacement adjusting valves configured to control displacement amounts of the spools of the first and second control valves, and a controller configured to output a control signal to the first and second spool displacement adjusting valves corresponding to a manipulation signal of an operator, and configured to limit a spool displacement amount of the second control valve according to the manipulation signal for the first actuator when the manipulation signal for a multiple operation of the first and second actuators is received.

Abstract: Disclosed are a construction machine and a method of controlling a construction machine. The construction machine includes: a first pump and a second pump; an engine which provides available torque to the first pump and the second pump; a first joystick and a second joystick which control actuators operated by a working fluid discharged from the first pump and the second pump; a joystick operation amount acquiring unit which acquires operation amounts of the first joystick and the second joystick; and a control unit which adjusts a torque distribution ratio with respect to the first pump and the second pump in accordance with the operation amounts of the first joystick and the second joystick when a sum of required torque of the first pump and required torque of the second pump is higher than the available torque.

Abstract: The present disclosure relates to a three-dimensional ground model generation and an automated earthwork target model generation system based on a parameter input.

Abstract: A control system for construction machinery, includes a hydraulic pump, at least one control valve installed in a center bypass line connected to the hydraulic pump and configured to control a flow direction of a working oil discharged from the hydraulic pump to selectively supply the working oil to an actuator, a bypass control valve installed downstream from the control valve in the center bypass line to variably control an amount of the working oil draining to a drain tank through the center bypass line, and a controller configured to control operations of the hydraulic pump and the bypass control valve according to a manipulation signal of an operator and to open the bypass control valve according to pump peak occurrence to reduce a pump peak.

Abstract: A control system for construction machinery includes a first hydraulic pump, first and second actuators connected to the first hydraulic pump through first and second hydraulic lines respectively, first and second control valves installed in the first and second hydraulic lines respectively and configured to control operations of the first and second actuators, and a controller configured to adjust a spool displacement amount of the first control valve according to an amount of working oil to be supplied to the first actuator when the first actuator performs a single or multiple operation by self-load.

Abstract: In a method of controlling a main control valve of an excavator, when speeds of a boom cylinder and an arm cylinder is increased by handling a boom joystick and an arm joystick, a second arm control spool between a first hydraulic pump and the arm cylinder may be closed. A first boom control spool between the first hydraulic pump and the boom cylinder may be opened to supply a first flux generated from the first hydraulic pump to the boom cylinder. A second boom control spool between a second hydraulic pump and the boom cylinder may be closed. A first arm control spool between the second hydraulic pump and the arm cylinder may be opened to supply a second flux generated from the second hydraulic pump to the arm cylinder.

Abstract: In a method of controlling a main control valve in construction machinery, a first joystick signal for controlling a first control valve device and/or a second joystick signal for controlling a second control valve device are received from one joystick. While one of the first and second control valve devices operates, whether or not a joystick signal for controlling another of the first and second control valve devices is inputted is determined. A weighted value is applied to a threshold of valve operation initiation with respect to a joystick displacement to determine a raised threshold of valve operation initiation. If the inputted joystick displacement satisfies the raised threshold of valve operation initiation, a valve stoke corresponding to the inputted joystick displacement is calculated and outputted.

Abstract: A control system for construction machinery, includes a hydraulic pump, first and second actuators connected to the hydraulic pump through first and second parallel lines respectively, first and second control valves installed in the first and second parallel lines respectively and configured to control operations of the first and second actuators, first and second spool displacement adjusting valves configured to control displacement amounts of the spools of the first and second control valves, and a controller configured to output a control signal to the first and second spool displacement adjusting valves corresponding to a manipulation signal of an operator, and configured to limit a spool displacement amount of the second control valve according to the manipulation signal for the first actuator when the manipulation signal for a multiple operation of the first and second actuators is received.

Abstract: A control system for construction machinery, includes a hydraulic pump, first and second actuators connected to the hydraulic pump through first and second parallel lines respectively, first and second control valves installed in the first and second parallel lines respectively and configured to control operations of the first and second actuators, first and second spool displacement adjusting valves configured to control displacement amounts of the spools of the first and second control valves, and a control valve control portion configured to output the control signal, and configured to limit a maximum allowable value of the manipulation signal for the first actuator to a value selected by the operator and limit a spool displacement amount of the second control valve according to the limited manipulation signal for the first actuator when the manipulation signal for a multiple operation of the first and second actuators is received.

Abstract: The present disclosure relates to a hydraulic system of construction machinery and a method of controlling the hydraulic system. The hydraulic system of construction machinery and the method of controlling the hydraulic system according to the present disclosure assign a weighted value for each operation, preliminarily distribute a (available torque that can be used) value that an engine can provide, through torque weighted values for each operation, and calculate surplus torque and deficient torque by comparing a preliminary distributable torque value to required torque. The surplus torque is provided for an operation in which torque is deemed to be deficient. Thus, the hydraulic system of construction machinery and the method of controlling the hydraulic system according to the present disclosure can sufficiently use available torque that can be used so that an operator can achieve a desired level of performance during the operation.