Abstract: A substrate processing facility includes a cleaning device for cleaning a substrate; and a drying device for drying the substrate cleaned by the cleaning device with a supercritical gas, wherein the cleaning device includes a sulfuric acid cleaning chamber.

Abstract: Disclosed are a cathode material for a lithium secondary battery, which improves air exposure stability while having high energy density with a single cathode material, and a method for manufacturing the cathode material. The cathode material includes a Li—[Mn—Ti]—Al—O-based cathode active material and a carbon coating layer including pitch carbon and coated on a surface of the cathode active material.

Abstract: A method of mixing a cathode active material in a process of manufacturing a cathode of a lithium secondary battery is provided. The method includes a preparation step of preparing a lithium compound removal solution in which PAA (polyacrylic acid) is mixed with a solvent, a removal step of reacting the lithium compound removal solution with the cathode active material, on a surface of which a lithium compound is present, thus removing the lithium compound present on the surface of the cathode active material, and a mixing step of mixing the cathode active material, which is mixed with the lithium compound removal solution, with a conductive material and a binder.

Abstract: The electrolyte solution for a lithium secondary battery includes: a lithium salt; a solvent; and an anode additive including 5-(4-cyanophenyl)-1-(4-fluorobenzyl)-1H-1,2,3-triazole-4-carbonitrile represented by Chemical Formula 1 below:

Abstract: Disclosed herein is a positive electrode material for a lithium (Li) secondary battery. The positive electrode material includes a positive electrode active material including Li—[Mn—Ti]-M—O containing transition metal M to allow reversible intercalation and reversible deintercalation of Li, and the positive electrode active material is coated with Li3PO4 to form a coating layer on a surface thereof.

Abstract: Disclosed are an electrolyte solution and an additive thereof, which may increase electrochemical properties of a lithium secondary battery.

Abstract: Disclosed is a positive electrode material for a lithium secondary battery. The positive electrode material includes a positive electrode active material formed of Li—[Mn—Ti]-M-O-based material including a transition metal (M) to enable reversible intercalation and deintercalation of lithium and molybdenum oxide.

Abstract: Disclosed is an additive for increasing the electrochemical properties of lithium secondary batteries.

Abstract: Disclosed is an additive for improving the electrochemical properties of a lithium secondary battery.

Abstract: A method of mixing a cathode active material in a process of manufacturing a cathode of a lithium secondary battery is provided. The method includes a preparation step of preparing a lithium compound removal solution in which PAA (polyacrylic acid) is mixed with a solvent, a removal step of reacting the lithium compound removal solution with the cathode active material, on a surface of which a lithium compound is present, thus removing the lithium compound present on the surface of the cathode active material, and a mixing step of mixing the cathode active material, which is mixed with the lithium compound removal solution, with a conductive material and a binder.

Abstract: Disclosed herein is a positive electrode material for a lithium secondary battery, which has a high energy density with only a single positive electrode material, and a lithium secondary battery including the same. A positive electrode active material is made of Li—[Mn—Ti]—O-based material and doped with Al.

Abstract: The electrolyte solution for a lithium secondary battery includes: a lithium salt; a solvent; and an anode additive including 5-(4-cyanophenyl)-1-(4-fluorobenzyl)-1H-1,2,3-triazole-4-carbonitrile represented by Chemical Formula 1 below: