Patents by Inventor Woody K. Sattayapiwat Tang

Woody K. Sattayapiwat Tang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for etching a titanium-containing layer prior to etching an aluminum layer in a metal stack
    Publication number: 20040192059
    Abstract: A method of plasma etching a metal stack on a semiconductor wafer is presented. The metal stack includes an aluminum layer overlaid with a titanium-containing anti-reflective coating (ARC) layer. The method includes flowing a fluorine-containing species (e.g., SF6) and a chlorine-containing species (e.g., BCl3 and Cl2) into a plasma etch chamber while etching the titanium-containing ARC layer.
    Type: Application
    Filed: March 28, 2003
    Publication date: September 30, 2004
    Applicant: Mosel Vitelic, Inc.
    Inventors: Woody K. Sattayapiwat Tang, George A. Kovall