Abstract: A charging cable for an electric vehicle includes a cable main body having a flat cross-section in a width direction thereof and partitioned into a plurality of internal regions. The charging cable includes terminal portions through which positive and negative power cables, a communication/sensor cable, a coolant flow channel, and a ground pass into the plurality of internal regions, respectively. The terminal portions are arranged in a row in the width direction of the cable main body.

Abstract: An apparatus for holding a cable for an electric vehicle charger includes a cable holding unit configured to restrict a charging cable extended and connected to a charging coupler, and to ascend or descend to predetermined positions, a housing unit mounted in a manner that is rotatable along a leftward-rightward direction, the cable holding unit being accommodated inside the housing unit, a driving unit configured to provide drive power for enabling the cable holding unit to ascend and descend and drive power for rotating the housing unit, and a control unit configured to control the driving unit in such a manner that the cabling holding unit and the housing unit are selectively driven when the charging coupler is removed from an electric vehicle charger or rests thereon.

Abstract: An equipment for inspecting a secondary battery is provided. The equipment includes a loading device on which a secondary battery is loaded in an upright position, and a side portion inspecting device which inspects a side portion of the secondary battery loaded on the loading device, wherein the side portion inspecting device comprises an elevation unit which lifts the secondary battery loaded on the loading device so as to be withdrawn out of the loading device and allows the secondary battery to return to its original position after a first period of time elapses and a side portion inspecting unit which captures an image of the side portion of the secondary battery, which is withdrawn out of the loading device by the elevation unit, thereby inspecting the side portion of the secondary battery.

Abstract: Provided is a system for etching with a plasma present invention relates to a system. A system for etching with plasma comprises a source power module 11 for applying a RF power to an upper electrode 15; a bias power module 12 for applying a RF power to a lower electrode; and a bias DC power module 13 for applying a bias DC power to a wafer 18.

Abstract: Provided is a particle trapping apparatus for preventing an error of a pressure measurement. A particle trapping apparatus for preventing an error of a pressure measurement includes a pressure-measuring means; a measuring pipe for connecting the pressure-measuring means to a processing chamber; and a trapping means for capturing particles in a gas flowing through the measuring pipe, wherein the trapping means is coupled to the measuring pipe or is a portion of the measuring pipe.

Abstract: Provided is a particle trapping apparatus for preventing an error of a pressure measurement. A particle trapping apparatus for preventing an error of a pressure measurement includes a pressure-measuring means; a measuring pipe for connecting the pressure-measuring means to a processing chamber; and a trapping means for capturing particles in a gas flowing through the measuring pipe, wherein the trapping means is coupled to the measuring pipe or is a portion of the measuring pipe.

Abstract: Provided is an electrostatic chuck with multiple heater zones. The electrostatic chuck with multiple heater zones comprises multiple micro heater zones; a switch module having each switching means connected to each micro heater zone; and a switch controlling module for controlling an operation of the switch module, wherein each micro heater zone can be heated individually by a corresponding heating element, and each partial area of a wafer secured on the electrostatic chuck is heated independently by each micro heater zone.

Abstract: Provided is an apparatus for monitoring an exchanging process of a semiconductor part and a method for the same. The apparatus comprises finger having a structure capable of loading the part and transferred by a robot for exchanging; and at least one image obtaining means coupled to the finger and obtaining an image of an exchanging position.

Abstract: Provided is an apparatus for monitoring an exchanging process of a semiconductor part and a method for the same. The apparatus comprises finger having a structure capable of loading the part and transferred by a robot for exchanging; and at least one image obtaining means coupled to the finger and obtaining an image of an exchanging position.

Abstract: Provided is a structure variable type of a plasma source coil and a method for controlling the same. The plasma source coil comprises a plurality of coil branches extending in a spiral shape based on a central part, wherein at least one coil branch has a structure in which the extending direction or a tilting level can be adjusted.

Abstract: Provided is a structure variable type of a plasma source coil and a method for controlling the same. The plasma source coil comprises a plurality of coil branches extending in a spiral shape based on a central part, wherein at least one coil branch has a structure in which the extending direction or a tilting level can be adjusted.

Abstract: Provided is an apparatus for exchanging an article of a semi-conductor process and a method for exchanging the article using the same. The apparatus for exchanging an article in a semiconductor process, comprising: a loading unit located at a finger coupled to a transferring means for loading the article'an operation controlling unit displaced at the loading unit and having a communicating means; and at least one vision unit.

Abstract: A device and a method of subdividing data service charge in mobile communication network is disclosed. In one embodiment, the method includes receiving a billing initiation request signal from a wireless data service device (either an interworking function (IWF) unit or a packet data serving node (PDSN)), producing a usage-amount data for the subscriber based on at least one of the type and amount of data being transmitted through the wireless data service device on the mobile communication network. The method also includes, responsive to a billing end request signal, received from the wireless data service device, transferring a billing request signal, requesting to bill the subscriber for the usage-amount data, to an authentication, authorization and accounting (AAA) unit. In one embodiment, the above method can apply to a graduated billing for the each service group in the mobile communication network.

Abstract: A device and a method of subdividing data service charge in mobile communication network is disclosed. In one embodiment, the method includes receiving a billing initiation request signal from a wireless data service device (either an interworking function (IWF) unit or a packet data serving node (PDSN)), producing a usage-amount data for the subscriber based on at least one of the type and amount of data being transmitted through the wireless data service device on the mobile communication network. The method also includes, responsive to a billing end request signal, received from the wireless data service device, transferring a billing request signal, requesting to bill the subscriber for the usage-amount data, to an authentication, authorization and accounting (AAA) unit. In one embodiment, the above method can apply to a graduated billing for the each service group in the mobile communication network.